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Fabricator capacity analysis

  • US 6,823,228 B2
  • Filed: 02/21/2002
  • Issued: 11/23/2004
  • Est. Priority Date: 02/21/2002
  • Status: Expired due to Fees
First Claim
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1. A method of determining fabricator capacity for a wafer start loading over a set time period, the wafer start loading having a number of wafer starts, the method comprising the steps of:

  • a) determining a common tool set capacity by dividing wafer starts that use common non-key shared tool sets by an overall capacity parameter, wherein the overall capacity parameter is based on a strategic characteristic wafer start loading;

    b) determining a technology capacity by dividing the wafer starts of each technology within the wafer start loading by a corresponding unique tool set capacity for the respective technology; and

    c) determining key shared tool set capacity by;

    i) determining a capacity consumption factor for each key shared tool set used by at least one process;

    ii) determining a capacity consumption of each key shared tool set used by a process of the wafer start loading;

    iii) decreasing a remaining capacity value for each key shared tool set used by the process of the wafer start loading by a corresponding capacity consumption;

    iv) repeating steps ii) and iii) for each process of the wafer start loading; and

    v) determining the amount of wafer start capacity available for each process by dividing each remaining capacity value by a corresponding capacity consumption factor for a corresponding process.

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