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Micro-fluidic devices

  • US 6,825,127 B2
  • Filed: 07/24/2001
  • Issued: 11/30/2004
  • Est. Priority Date: 07/24/2001
  • Status: Expired due to Term
First Claim
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1. A method of fabricating a microstructure for micro-fluidics applications, comprising the steps of:

  • forming a layer of etchable material on a substrate;

    forming a mechanically stable support layer over said etchable material;

    performing an anisotropic etch through a mask to form a pattern of holes extending through said support layer to said etchable material and lving along a projected oath of a continuous micro-channel to be formed within said etchable material, performing an isotropic etch through each said hole to form a corresponding cavity in said etchable material under each said hole, said corresponding cavity extending under said support layer to communicate with an adjacent said cavity whereby a series of said communicating cavities form said micro-channel; and

    forming a further layer of depositable material over said support layer until overhanging portions of said depositable layer meet to close each said hole.

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