Deposition of film layers by alternately pulsing a precursor and high frequency power in a continuous gas flow

• US 6,825,134 B2
• Filed: 09/24/2002
• Issued: 11/30/2004
• Est. Priority Date: 03/26/2002
• Status: Expired due to Term

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Harshbarger, William R., Park, Beom Soo, Maydan, Dan, Choi, Soo Young, White, John M., Law, Kam S., Yadav, Sanjay, Shang, Quanyuan
• Primary Examiner(s): Whitehead, Jr., Carl
• Assistant Examiner(s): Smoot, Stephen W.
• Application Number:
  US10/254,627
• Publication Number:
  US 20030186561A1
• Time in Patent Office: 798 Days
• Field of Search: 438/761, 438/788, 427/569, 427/573, 427/579, 427/585
• US Class Current: 438/788
• CPC Class Codes: C23C 16/402 Silicon dioxide
• CPC Class Codes: C23C 16/45542 Plasma being used non-continuously during the ALD reactions
• CPC Class Codes: H01L 21/02164 the material being a silicon oxide, e.g. SiO2
• CPC Class Codes: H01L 21/02274 in the presence of a plasma [PECVD]
• CPC Class Codes: H01L 21/0228 deposition by cyclic CVD, e.g. ALD, ALE, pulsed CVD
• CPC Class Codes: H01L 21/3143 composed of alternated layers or of mixtures of nitrides and oxides or of oxinitrides, e.g. formation of oxinitride by oxidation of nitride layers
• CPC Class Codes: H01L 21/31612 on a silicon body
• CPC Class Codes: H01L 21/31683 of metallic layers, e.g. Al deposited on the body, e.g. formation of multi-layer insulating structures
• CPC Class Codes: H01L 21/318 composed of nitrides
• CPC Class Codes: H01L 21/3185 of siliconnitrides
• CPC Class Codes: H01L 21/32105 Oxidation of silicon-containing layers
• CPC Class Codes: H01L 21/3211 Nitridation of silicon-containing layers
• CPC Class Codes: H01L 29/66765 Lateral single gate single channel transistors with inverted structure, i.e. the channel layer is formed after the gate

Abstract

A method of film layer deposition is described. A film layer is deposited using a cyclical deposition process. The cyclical deposition process consists essentially of a continuous flow of one or more process gases and the alternate pulsing of a precursor and energy to form a film on a substrate structure.

Claims

1. A method for forming a film layer on a substrate in a process chamber, comprising:

(a) exposing said substrate to a substantially continuous flow of a process gas composition at a constant flow rate under process conditions for a first period of time;

(b) after the first period of time, pulsing a precursor into the chamber, wherein the substantially continuous flow of the process gas composition at the constant flow rate is maintained during the pulsing, and wherein said precursor does not react with said process gas under said process conditions;

then

(c) continuing the substantially continuous flow of the process gas composition at the constant flow rate for second period of time;

(d) after the second period of time, pulsing high frequency power in the chamber to produce plasma conditions, wherein the substantially continuous flow of the process gas composition at the constant flow rate is maintained during the pulsing high frequency power, and wherein under said plasma conditions said precursor reacts with said process gas; and

(e) repeating (a), (b), (c), and (d) until a desired thickness of said film layer has been achieved, wherein said film layer is silicon nitride (Si₃N₄), silicon oxide (SiO) or silicon dioxide (SiO₂).

2. The method of claim 1, wherein said process gas composition consists essentially of ammonia (NH₃), hydrazine (N₂H₄), nitrogen (N₂), oxygen (O₂), ozone (O₃), hydrogen (H₂), water vapor (H₂O) or combinations thereof.

3. The method of claim 1, wherein said high frequency power is an RF power.

4. The method of claim 3, wherein said RF power is supplied to a showerhead.

5. The method of claim 3, wherein said RF power is supplied to a substrate support pedestal.

6. The method of claim 3, wherein said high frequency power is about 500 to 2000 Watts.

7. The method of claim 6, whereinsaid high frequency power is about 750 to about 1750 Watts.

8. The method of claim 7, wherein said high frequency power is about 900 to about 1200 Watts.

9. The method of claim 1, wherein the substrate is maintained at a temperature of less than 500°

C.

10. The method of claim 9, wherein the substrate is maintained at a temperature of less than 350°

C.

11. The method of claim 1, wherein the process chamber is maintained at a pressure of between about 10 millitorr and about 10 torr.

12. The method of claim 11, wherein the process chamber is maintained at a pressure of between about 0.5 torr and about 5 torr.

13. The method of claim 12, wherein the process chamber is maintained at a pressure of between about 1.0 torr and about 5 torr.

14. The method of claim 1, wherein said process gas composition is provided at a scorn of about 200 to about 3000.

15. The method of claim 1, wherein said pulsing of said precursor has a duration of about 0.5 to about 2 seconds.

16. The method of claim 15, wherein said pulsing of said precursor has a duration of about 0.7 to about 1 second.

17. The method of claim 1, wherein said pulsing high frequency power comprises an RF pulse.

18. The method of claim 17, wherein said RF pulse has a duration of about 2 seconds to about 10 seconds.

19. The method of claim 18, wherein said RF pulse has a duration of about 3 seconds to about 5 seconds.

20. A method for forming a film layer on a substrate in a process chamber, comprising:

(a) exposing said substrate to a substantially continuous flow of a process gas composition at a constant flow rate under process conditions for a first period of time, wherein said process gas composition is a combination of H₂ and O₂ gases;

(b) after the first period of time, pulsing a precursor into the chamber, wherein the substantialy continuous flow of the process gas compososition at the constant flow rate is maintained during the pulsing, and wherein said precursor does not react with said process gas under said process conditions;

then

(c) continuing the substantially continuous flow of the process gas composition at the constant flow rate for second period of time;

(d) after the second period of time, pulsing high frequency power in the chamber to produce plasma conditions, wherein the substantially continuous flow of the process gas composition at the constant flow rate is maintained during the pulsing high frequency power, and wherein under said plasma conditions said precursor reacts with said process gas; and

(e) repeating (a), (b), (c), and (d) until a desired thickness of said film layer has been achieved.

21. A method for forming a film layer on a substrate in a process chamber, comprising:

(a) exposing said substrate to a substantially continuous flow of a process gas composition at a constant flow rate under process conditions for a first period of time;

(b) after the first period of time, pulsing a precursor into the chamber, wherein the substantially continuous flow of the process gas composition at the constant flow rate is maintained during the pulsing, wherein said precursor does not react with said process gas under said process conditions, and wherein said precursor is a halogenated silicon compound;

then

(c) continuing the substantially continuous flow of the process gas composition at the constant flow rate for second period of time;

(d) after the second period of time, pulsing high frequency power in the chamber to produce plasma conditions, wherein the substantially continuous flow of the process gas composition at the constant flow rate is maintained during the pulsing high frequency power, and wherein under said plasma conditions said precursor reacts with said process gas; and

(e) repeating (a), (b), (c), and (d) until a desired thickness of said film layer has been achieved.

22. The method of claim 21, wherein said halogenated silicon compound is silicon tetrachloride (SiCl₄), dichlorosilane (Si₂Cl₂H₂), or trichlorosilane (SiCl₃H).

23. A method for forming a film layer on a substrate in a process chamber, comprising:

(a) exposing said substrate to a substantially continuous flow of a process gas composition at a constant flow rate under process conditions for a first period of time;

(b) after the first period of time, pulsing a precursor into the chamber, wherein the substantially continuous flow of the process gas composition at the constant flow rate is maintained during the pulsing, wherein said precursor does not react with said process gas under said process conditions, and wherein said precursor is a siloxane compound;

then

(c) continuing the substantially continuous flow of the process gas composition at the constant flow rate for second period of time;

(d) after the second period of time, pulsing high frequency power in the chamber to produce plasma conditions, wherein the substantially continuous flow of the process gas composition at the constant flow rate is maintained during the pulsing high frequency power, and wherein under said plasma conditions said precursor reacts with said process gas; and

(e) repeating (a), (b), (c), and (d) until a desired thickness of said film layer has been achieved.

24. A method for forming a film layer on a substrate in a process chamber, comprising:

(a) exposing said substrate to a substantially continuous flow of a process gas composition at a constant flow rate under process conditions for a first period of time;

(b) after the first period of time, pulsing a precursor into the chamber, wherein the substantially continuous flow of the process gas composition at the constant flow rate is maintained during the pulsing, wherein said precursor does not react with said process gas under said process conditions, and wherein said precursor is silane (SiH₄) or disilane (Si₂H₆);

then

(c) continuing the substantially continuous flow of the process gas composition at the constant flow rate for second period of time;

(d) after the second period of time, pulsing high frequency power in the chamber to produce plasma conditions, wherein the substantially continuous flow of the process gas composition at the constant flow rate is maintained during the pulsing high frequency power, and wherein under said plasma conditions said precursor reacts with said process gas; and

(e) repeating (a), (b), (c), and (d) until a desired thickness of said film layer has been achieved.

25. A method for forming a film layer on a substrate in a process chamber, comprising;

(a) exposing said substrate to substantially continuous flow of a process gas composition at a constant flow rate under process conditions for a first period of time;

(b) after the first period of time, pulsing a precursor into the chamber, wherein the substantially continuous flow of the process gas composition at the constant flow rate is maintained during the pulsing, wherein said precursor does not react with said process gas under said process conditions, and wherein said pulsing a precursor into the chamber comprises more than one injection of a precursor;

then

(c) continuing the substantially continuous flow of the process as composition at the constant flow rate for second period of time;

(d) after the second period of time, pulsing high frequency power in the chamber to produce plasma conditions, wherein the substantially continuous flow of the process gas composition at the constant flow rate is maintained during the pulsing high frequency power, and wherein under said plasma conditions said precursor reacts with said process gas; and

(e) repeating (a), (b), (c), and (d) until a desired thickness of said film layer has been achieved.

26. A method for forming a film layer on a substrate in a process chamber, comprising:

(a) exposing said substrate to a substantially continuous flow of a process gas composition at a constant flow rate under process conditions for a first period of time;

(b) after the first period of time, pulsing a precursor into the chamber, wherein the substantially continuous flow of the process gas composition at the constant flow rate is maintained during the pulsing, and wherein said precursor does not react with said process gas under said process conditions;

then

(c) continuing the substantially continuous flow of the process gas composition at the constant flow rate for second period of time;

(d) after the second period of time, pulsing high frequency power in the chamber to produce plasma conditions, wherein the substantially continuous flow of the process gas composition at the constant flow rate is maintained during the pulsing high frequency power, wherein under said plasma conditions said precursor reacts with said process gas, and wherein said pulsing high frequency power comprises more than one pulse of a high frequency power; and

(e) repeating (a), (b), (c), and (d) until a desired thickness of said film layer has been achieved.

27. A method for forming a film on a substrate in a process chamber using a cyclical deposition process using a precursor, comprising:

(a) exposing said substrate to a substantially continuous flow of a combination of H₂ and O₂ at a rate of about 500-2000 sccm for a first period of time of about 0.5 seconds to about 1 second;

(b) after the first period of time, pulsing SiCl₄ into the chamber at a rate of about 200 to about 500 sccm for about 0.5 seconds to about 1 second, wherein the substantially continuous flow of the combination of H₂ and O₂ is maintained during the pulsing;

then

(c) continuing the substantially continuous flow of the combination of H₂ and O₂ for a second period of about 1 second to about 4 seconds;

(d) after the second period of time, pulsing RF power at about 500 W to about 2000 W for about 2 seconds to about 6 seconds, wherein the substantially continuous flow of the combination of H₂ and O₂ is maintained during the pulsing RF power; and

(e) repeating (a), (b), (c), and (d) until a desired thickness of said film layer has been achieved.

28. A method for forming a film layer on a substrate in a process chamber, comprising:

(a) exposing the substrate to a continuous flow of a first gas composition at a constant flow rate for a first period of time;

(b) exposing the substrate to a second gas composition and the continuous flow of a first gas at the constant flow rate for a second period of time, wherein the second gas composition is a silicon-containing precursor;

(c) exposing the substrate to the continuous flow of a first gas composition at the constant flow rate for a third period of time;

(d) electrically coupling high frequency power into the process chamber during a fourth period of time, thereby exciting the first gas composition into a plasma state, wherein the second gas composition reacts with the first gas composition to form a film layer on the substrate, and wherein the continuous flow of a first gas composition at the constant flow rate is maintained during the fourth period of time; and

(e) repeating (a), (b), (c), and (d) until a desired thickness of said film layer has been achieved.

29. The method of claim 28, wherein the silicon-containing precursor is a halogenated silicon compound.

30. The method of claim 28, wherein the exposing the substrate to a second gas composition comprises providing a pulse of the second gas composition.

31. The method of claim 28, wherein the first period of time is about 0.2 seconds to about 5 seconds, and the third period of time is about 0.2 seconds to about 5 seconds.

32. The method of claim 28, wherein the exposing the substrate to the continuous flow of a first process gas composition for a third period of time removes excess second gas composition from the process chamber.

33. A method for forming a film layer on a substrate in a process chamber, comprising:

(a) exposing the substrate to a continuous flow of a first gas composition at a constant flow rate for a first period of time, wherein the first gas composition is a combination of H₂ and O₂ gases;

(b) exposing the substrate to a second gas composition and the continuous flow of a first gas at the constant flow rate for a second period of time;

(c) exposing the substrate to the continuous flow of a first gas composition at the constant flow rate for a third period of time;

(d) electrically coupling high frequency power into the process chamber during a fourth period of time, thereby exciting the first gas composition into a plasma state, wherein the second gas composition reacts with the first gas composition to form a film layer on the substrate, and wherein the continuous flow of a first gas composition at the constant flow rate is maintained during the fourth period of time; and

(e) repeating (a), (b), (c), and (d) until a desired thickness of said film layer has been achieved.