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Inspection data analysis program, defect inspection apparatus, defect inspection system and method for semiconductor device

  • US 6,826,735 B2
  • Filed: 07/17/2002
  • Issued: 11/30/2004
  • Est. Priority Date: 09/26/2001
  • Status: Expired due to Fees
First Claim
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1. An inspection data analyzing program to be executed on hardware for determining a detection error from output data of an inspection apparatus which detects a particle or a pattern defect of a circuit pattern, the inspection data analyzing program comprising:

  • reading inspection data output from the inspection apparatus, wherein the inspection data output includes at least one information piece of coordinate value information and size information of the particle or pattern defect of the circuit pattern;

    reading drawing data of a product of the circuit pattern;

    extracting information representative of a relation between at least one information piece of coordinated value information and size information of the particle or pattern defect of the circuit pattern in the inspection data output and the drawing data;

    obtaining information representing a relation between detection error data obtained based on past inspection data output as to a circuit pattern from output data of the inspection apparatus and circuit layout data of a computer-aid design (CAD) and storing the information thus obtained as a detection error database;

    comparing the information extracted with detection error database to determine whether each particle or pattern defect of the circuit pattern in the inspection data is a detection error; and

    subjecting newly output inspection data excluding detection error data thus determined to defect analysis.

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