Optical device provided with a resin thin film having a micro-asperity pattern and manufacturing method and apparatus of the optical device
First Claim
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1. A manufacturing method of an optical device, comprising the steps of:
- preparing a cylindrical die unit, an outer circumferential surface of which is formed with a micro-asperity pattern;
preparing a substrate that is coated with a thin resin film;
holding the substrate by a transfer stage; and
forming a micro-asperity pattern on the thin resin film by pressing the outer circumferential surface of the die unit against the thin resin film with pressurizing means while rolling the die unit on the thin resin film.
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Abstract
A cylindrical embossment roll whose outer circumferential surface is formed with a micro-asperity pattern is prepared. A substrate is coated with a thin resin film. The substrate is held by a transfer stage, and a micro-asperity pattern is formed on the thin resin film by pressing the outer circumferential surface of the embossment roll against the thin resin film with a pressurizing mechanism while rolling the embossment roll on the thin resin film.
29 Citations
21 Claims
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1. A manufacturing method of an optical device, comprising the steps of:
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preparing a cylindrical die unit, an outer circumferential surface of which is formed with a micro-asperity pattern;
preparing a substrate that is coated with a thin resin film;
holding the substrate by a transfer stage; and
forming a micro-asperity pattern on the thin resin film by pressing the outer circumferential surface of the die unit against the thin resin film with pressurizing means while rolling the die unit on the thin resin film. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A manufacturing apparatus of an optical device, comprising:
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a transfer stage for holding a substrate that is coated with a thin resin film;
a cylindrical die unit, an outer circumferential surface of which is formed with a micro-asperity pattern;
a moving mechanism for moving the transfer stage in a direction that crosses a rotation axis of the die unit; and
a pressurizing mechanism for pressing the outer circumferential surface of the die unit against the thin resin film in such a manner that the die unit can rotate about the rotation axis, wherein a micro-asperity pattern is formed on the thin resin film as the die unit rolls on the thin resin film while being pressed against the thin resin film. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17)
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18. A manufacturing apparatus of an optical device, comprising:
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a transfer stage for holding a substrate that is coated with a thin resin film;
a cylindrical die unit an outer circumferential surface of which is formed with a micro-asperity pattern;
a pressurizing mechanism for pressing the outer circumferential surface of the die unit against the thin resin film in such a manner that the die unit can rotate about a rotation axis thereof, a moving mechanism for moving one of the transfer stage and the die unit;
an airtight chamber for accommodating at least the transfer stage, the die unit, the pressurizing mechanism, and the moving mechanism; and
exhausting means for exhausting a gas from the airtight chamber prior to an operation that a micro-asperity pattern is formed on the thin resin film as the die unit rolls on the thin resin film while being pressed against the thin resin film.
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19. An optical device comprising:
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a substrate; and
a thin resin film formed on the substrate, a top surface of the thin resin film being formed with a micro-asperity pattern and an alignment mark that will serve as a positional reference when an optical component is disposed at a prescribed position with respect to the substrate, the micro-asperity pattern and the alignment mark being formed by rolling, on an original resin film, a cylindrical die unit, an outer circumferential surface of which is formed with a micro-asperity pattern, and a portion having an inverted shape of a shape of the alignment mark while pressing the die unit against the original thin resin film. - View Dependent Claims (20, 21)
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Specification