Two-dimensional free-space optical wavelength routing element based on stepwise controlled tilting mirrors
First Claim
Patent Images
1. A microstructure for steering light, the microstructure comprising:
- a structural film;
a flexible pivot member connected with the structural film and supporting a base, the base including a reflective coating;
at least three noncollinear fixed rotational actuators connected with the structural film, each such fixed rotational actuator being configured to deflect the base towards the structural film upon activation; and
a movable hard stop connected with the structural film, wherein the base assumes one of a plurality of tilt positions according to which of such fixed rotational actuators is activated and according to a position of such movable hard stop.
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Abstract
A microstructure for steering light is provided that may be stepwise controlled to provide tilt positions in two dimensions. The arrangement is two-dimensional since a tilt axis may be defined as the axis along which the base is tilted to move from one of the two tilt positions to the other. At least one additional tilt position is provided that cannot be reached from either of those two tilt positions by tilting the micromirror assembly along the tilt axis. Instead, such an additional tilt position requires that there at least be a tilt component in a direction orthogonal to the tilt axis.
19 Citations
19 Claims
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1. A microstructure for steering light, the microstructure comprising:
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a structural film;
a flexible pivot member connected with the structural film and supporting a base, the base including a reflective coating;
at least three noncollinear fixed rotational actuators connected with the structural film, each such fixed rotational actuator being configured to deflect the base towards the structural film upon activation; and
a movable hard stop connected with the structural film, wherein the base assumes one of a plurality of tilt positions according to which of such fixed rotational actuators is activated and according to a position of such movable hard stop. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method for fabricating a microstructure for steering light, the method comprising:
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forming a flexible pivot member on a structural film;
forming a base on the pivot member;
depositing a reflective coating on the base;
forming at least three noncollinear fixed rotational actuators over the structural film, each such fixed rotational actuator being configured to deflect the base towards the structural film upon activation; and
forming a movable hard stop over the structural film such that the base may assume a plurality of tilt positions by activating a selection of such fixed rotational actuators and moving the movable hard stop to a desired position. - View Dependent Claims (13, 14, 15, 16)
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17. A microstructure for steering light, the microstructure comprising:
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support means;
micromirror means connected with the support means with a flexible pivot means and tiltable to at least three tilt positions, wherein a first and second of such at least three tilt positions define a tilt axis and a third of such at least three tilt positions includes a tilt component orthogonal to the tilt axis, and wherein the micromirror means comprises movable stop means connected with the support means to define the at least three tilt positions. - View Dependent Claims (18, 19)
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Specification