Optical path control apparatus with mirror section, and manufacturing method for the same

• US 6,829,079 B2
• Filed: 12/21/2001
• Issued: 12/07/2004
• Est. Priority Date: 12/22/2000
• Status: Active Grant

• Current Assignee: NEC Corporation
• Original Assignee: NEC Corporation
• Inventors: Sasaki, Yasuhiro, Kouta, Hikaru, Oda, Mikio, Kitajo, Sakae, Yamamoto, Mitsuru, Shimada, Yuzo
• Primary Examiner(s): Schwartz, Jordan M.
• Assistant Examiner(s): STULTZ, JESSICA T
• Application Number:
  US10/028,238
• Publication Number:
  US 20030117690A1
• Time in Patent Office: 1,082 Days
• Field of Search: 359/298, 359/315, 359/318, 359/320-1, 359/871-2, 359/881, 359/877-8, 359/883-4
• US Class Current: 359/318
• CPC Class Codes: G02B 2006/12145 Switch
• CPC Class Codes: G02B 6/352 the reflective optical element having a shaped reflective surface, e.g. a reflective element comprising several reflective surfaces or facets that function together
• CPC Class Codes: G02B 6/3548 1xN switch, i.e. one input and a selectable single output of N possible outputs
• CPC Class Codes: G02B 6/357 Electrostatic force electrostatic forces controlling reflecting elements in general G02B26/0841
• CPC Class Codes: G02B 6/3572 Magnetic force magnetic forces controlling reflecting elements in general G02B26/085; magneto-optic devices G02F1/09
• CPC Class Codes: G02B 6/3574 Mechanical force, e.g. pressure variations
• CPC Class Codes: G02B 6/3578 Piezoelectric force piezoelectric forces controlling reflecting elements in general G02B26/0858; piezo-optic devices G02F1/0131
• CPC Class Codes: G02B 6/3598 Switching means directly located between an optoelectronic element and waveguides, including direct displacement of either the element or the waveguide, e.g. optical pulse generation based on changing the optical properties of the medium G02F1/00; optical pulse generation in optical transmitters H04B10/508; optical pulse generation by controlling laser operation H01S3/00
• CPC Class Codes: G02B 6/43 Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections

Abstract

An optical path control apparatus includes a first substrate. A second substrate is movably provided for the first substrate. A mirror section is provided on the second substrate. A driving section moves the second substrate such that a first optical path of input light to the mirror section is optically connected to one of a plurality of second optical paths.

Claims

1. An optical path control apparatus comprising:

a first substrate,

a second substrate which is movable relative to said first substrate;

a mirror section provided on said second substrate; and

a driving section which moves said second substrate such that a first optical path of input light to said mirror section is optically connected to one of a plurality of second optical paths, wherein said driving section is an ultrasonic wave generating source, and

said second substrate is moved by progressive waves generated by said ultrasonic wave generating source and is located on a position by standing waves, and

said first optical path is optically connected to said second optical path associated with said position.

2. An optical path control apparatus comprising:

a first substrate;

a second substrate which is movable to relative to said first substrate, said second substrate being in contact with said first substrate, while said second substrate is moving relative to said first substrate;

a mirror section provided on said second substrate to have a relative surface with a fixedly predetermined angle with respect to a surface of said second substrate; and

a driving section which moves said second substrate such that a first optical path of input light to said mirror section is optically connected to one of a plurality of second optical paths,

wherein said second substrate has a gear shape, and said mirror section is provided on said second substrate via a base section,

said driving section has an electrostatic actuator, and rotates said second substrate based on force generated by said electrostatic actuator such that said mirror section is rotated, and

said first optical path is optically connected to said second optical path associated with a rotation angle of said mirror section.

3. An optical path control apparatus comprising:

a first substrate;

a second substrate which is movable relative to said first substrate;

a mirror section provided on said second substrate; and

a driving section which moves said second substrate such that a first optical path of input light to said mirror section is optically connected to one of a plurality of second optical paths, wherein said second substrate has a micro light wheel,

said driving section has lasers, and rotates said second substrate based on laser beams emitted by said lasers, and

said first optical path is optically connected to said second optical path associated with a rotation angle of said mirror section.

4. An optical path control apparatus comprising:

a first substrate;

a second substrate which is movable relative to said first substrate;

a mirror section provided on said second substrate; and

a driving section which moves said second substrate such that a first optical path of input light to said mirror section is optically connected to one of a plurality of second optical paths, wherein said second substrate is provided in a concave section of said first substrate, said concave section being filled with fluid;

said driving section moves said second substrate by supplying said fluid from one end of said concave section and absorbing said fluid from another end of said concave section,

said mirror section reflects said input light based on the movement of said second substrate such that said first optical path is optically connected to said second optical path.

5. An optical path control apparatus comprising:

a substrate; and

a mirror section which has a reflective surface with a fixedly predetermined angle with respect to a surface of said substrate and is provided on said substrate and changes an optical path of reflection light to input light by said mirror section in response to an input signal, wherein said mirror section comprises;

a mirror layer provided as a surface layer;

a layer changing its shape in response to said input signal provided under said mirror layer; and

an electrode layer provided under said layer changing its shape,

wherein said mirror layer of said mirror section is transformed through transformation of said layer changing its shape in response to supply of said input signal such that a reflection angle of said mirror section is changed.

6. An optical path control apparatus comprising:

a substrate; and

a mirror section which is provided on said substrate and changes an optical path of reflection light to input light by said mirror section in response to an input signal, wherein said mirror section comprises;

a mirror layer provided as a surface layer;

a shape memory layer provided under said mirror layer; and

a heating layer provided under said shape memory layer,

wherein said mirror layer of said mirror section is transformed due to transformation of said shape memory layer through heating by said heating layer in response to said input signal such that a reflection angle of said mirror section is changed.

7. An optical path control apparatus comprising:

a first substrate;

a second substrate which is movable relative to said first substrate;

a mirror section provided over said first and second substrate, and having a reflective surface with an angle larger than zero with respect to a surface of said first substrate, and said reflective surface being on a side of said first substrate; and

a driving section which moves said second substrate such that a first optical path of input light to said mirror section is optically connected to one of a plurality of second optical paths.