Charge control of micro-electromechanical device
First Claim
1. A method of controlling a micro-electromechanical system (MEMS) device having a variable capacitor defining a variable gap distance, comprising:
- applying a reference voltage having a selected voltage level across the MEMS device for a duration at least as long as an electrical time constant of the MEMS device, but shorter than a mechanical time constant of the MEMS device, to cause a stored charge having a desired magnitude to accumulate on the variable capacitor, wherein the variable gap distance is a function of magnitude of the stored charge.
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Abstract
A charge control circuit for controlling a micro-electromechanical system (MEMS) device having variable capacitor formed by first conductive plate and a second conductive plate separated by a variable gap distance. The charge control circuit comprises a switch circuit configured to receive a reference voltage having a selected voltage level and configured to respond to an enable signal having a duration at least as long as an electrical time constant constant of the MEMS device, but shorter than a mechanical time constant of the MEMS device, to apply the selected voltage level across the first and second plates for the duration to thereby cause a stored charge having a desired magnitude to accumulate on the variable capacitor, wherein the variable gap distance is a function of the magnitude of the stored charge.
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Citations
6 Claims
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1. A method of controlling a micro-electromechanical system (MEMS) device having a variable capacitor defining a variable gap distance, comprising:
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applying a reference voltage having a selected voltage level across the MEMS device for a duration at least as long as an electrical time constant of the MEMS device, but shorter than a mechanical time constant of the MEMS device, to cause a stored charge having a desired magnitude to accumulate on the variable capacitor, wherein the variable gap distance is a function of magnitude of the stored charge. - View Dependent Claims (2)
removing a stored charge on the variable capacitor prior to applying the reference voltage across the micro-electromechanical device.
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3. A method of controlling a MEMS actuator having a pair of plates with a gap therebetween supported by a spring mechanism having a mechanical time constant, comprising:
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applying a isolatable voltage to the pair of plates to select a desired gap size by having a reference voltage applied for a duration less than the mechanical time constant then removing the reference voltage after a desired charge has been applied to the pair of plates. - View Dependent Claims (4)
removing the desired charge accumulated between the first plate and the second plate.
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5. A method of controlling a MEMS actuator having a first plate and a second plate with a restoring force applied to a gap therebetween, the second plate coupled to ground, comprising:
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switching a reference voltage across the first plate and ground;
accumulating a desired charge on the first plate and second plate for a duration less than a mechanical time constant of the MEMS actuator; and
decoupling the reference voltage from the first plate. - View Dependent Claims (6)
switching the first plate to ground to remove charge accumulated between the first plate and the second plate.
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Specification