×

Cerium oxide containing ceramic components and coatings in semiconductor processing equipment and methods of manufacture thereof

  • US 6,830,622 B2
  • Filed: 03/30/2001
  • Issued: 12/14/2004
  • Est. Priority Date: 03/30/2001
  • Status: Expired due to Fees
First Claim
Patent Images

1. A component of semiconductor processing equipment, the component comprising an aluminum substrate having an anodized surface and a plasma sprayed ceramic layer of cerium oxide containing ceramic material on the anodized surface of the substrate and forming an outermost surface of the component, wherein the cerium oxide containing ceramic material (a) consists essentially of one or more cerium oxides or (b) consists essentially of one or more cerium oxides as the single largest constituent thereof and an oxide of an element of the lanthanide series.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×