Low inertia latching microactuator
First Claim
1. A Micromechanical actuator, comprising:
- a nonmagnetic substrate having a top surface;
a fixed magnetic core formed on the substrate, the magnetic core having end faces spaced apart to define a gap in the core;
a pivotably mounted driven member free to move through an arc of less than 360 degrees and attached to a stationary pivot point;
a magnetic tab affixed to one end of the pivotably mounted driven member, said tab comprising magnetic material and so disposed as to protrude into the gap over a portion of its allowed arc of rotation;
a hinge for supporting the pivotably mounted driven member above the substrate, said hinge allowing the angular movement of the member, and allowing the magnetic tab of the member to move through a vicinity of the gap; and
a coil of electrical conductor coupled to the fixed magnetic core to provide magnetic flux therethrough when the coil is supplied with electrical current, such that a magnetic field arises in the gap formed in the core which can impart motion to the pivotably mounted driven member by interaction of the gap field with the magnetic protruding tab on said member.
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Accused Products
Abstract
A surface micromachined micromagnetic actuator is described, wherein rotary actuation is accomplished by a member pivotably mounted on the surface of the substrate. Angular motion of the member about the pivot point is imparted by the interaction of a magnetic tab affixed to the member, with flux generated in the gap of an electromagnetic core. Rotary motion is restricted to less than 360 degrees by using an integrally formed hinge between the pivoting member and the pivot point, rather than by a more complex bearing. By virtue of this design, a large range of motion can be achieved without requiring a true bearing to be fabricated in the device. The pivoting member is also constrained in either of two stable positions upon de-energization of the electromagnetic core, by the attachment of a bistable spring between the pivoting member and the substrate.
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Citations
24 Claims
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1. A Micromechanical actuator, comprising:
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a nonmagnetic substrate having a top surface;
a fixed magnetic core formed on the substrate, the magnetic core having end faces spaced apart to define a gap in the core;
a pivotably mounted driven member free to move through an arc of less than 360 degrees and attached to a stationary pivot point;
a magnetic tab affixed to one end of the pivotably mounted driven member, said tab comprising magnetic material and so disposed as to protrude into the gap over a portion of its allowed arc of rotation;
a hinge for supporting the pivotably mounted driven member above the substrate, said hinge allowing the angular movement of the member, and allowing the magnetic tab of the member to move through a vicinity of the gap; and
a coil of electrical conductor coupled to the fixed magnetic core to provide magnetic flux therethrough when the coil is supplied with electrical current, such that a magnetic field arises in the gap formed in the core which can impart motion to the pivotably mounted driven member by interaction of the gap field with the magnetic protruding tab on said member. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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Specification