Microelectromechanical system with stiff coupling
First Claim
Patent Images
1. A microelectromechanical system that comprises:
- a substrate;
a lever movably interconnected with said substrate at a first location and comprising a first free lever end that is displaced from said first location and moveable relative to said substrate;
an actuator assembly interconnected with said substrate for movement along a first path; and
an elongate coupling comprising a first coupling end interconnected with said actuator assembly and a second coupling end interconnected with said lever, wherein said actuator assembly generates an actuation force to move said first free lever end relative to said substrate, respectively, by a movement of said actuator assembly along said first path, wherein a buckle strength of said elongate coupling between said first and second coupling ends is greater than a maximum magnitude of a component of said actuation force that is along said first path.
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Abstract
A microelectromechanical system is disclosed that uses a stiff tether between an actuator assembly and a lever that is interconnected with an appropriate substrate such that a first end of the lever may move relative to the substrate, depending upon the direction of motion of the actuator assembly. Any appropriate load may be interconnected with the lever, including a mirror for any optical application.
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Citations
26 Claims
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1. A microelectromechanical system that comprises:
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a substrate;
a lever movably interconnected with said substrate at a first location and comprising a first free lever end that is displaced from said first location and moveable relative to said substrate;
an actuator assembly interconnected with said substrate for movement along a first path; and
an elongate coupling comprising a first coupling end interconnected with said actuator assembly and a second coupling end interconnected with said lever, wherein said actuator assembly generates an actuation force to move said first free lever end relative to said substrate, respectively, by a movement of said actuator assembly along said first path, wherein a buckle strength of said elongate coupling between said first and second coupling ends is greater than a maximum magnitude of a component of said actuation force that is along said first path. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
said actuator assembly comprises at least one actuator. -
3. A system, as claimed in claim 1, further comprising:
a displacement multiplier disposed between said actuator assembly and said coupling such that said actuator assembly is indirectly interconnected with said elongate coupling.
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4. A system, as claimed in claim 1, wherein:
said first path is at least generally parallel with said substrate.
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5. A system, as claimed in claim 1, wherein:
said actuator assembly moves in a first direction along said first path to exert a first said actuation force on said elongate coupling, and moves in a second direction along said first path to exert a second said actuation force on said elongate coupling, said first direction being opposite said second direction.
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6. A system, as claimed in claim 1, wherein:
said elongate coupling has a length of at least about 1,300 microns.
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7. A system, as claimed in claim 1, wherein:
said elongate coupling comprises first and second structural layers that are disposed in spaced relation and rigidly interconnected at a plurality of locations between said first and second coupling ends.
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8. A system, as claimed in claim 1, wherein:
a movement of said first free lever end relative to said substrate by said actuator assembly exerting said actuation force on said elongate coupling is at least substantially solely controlled by external forces that are exerted on said elongate coupling.
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9. A system, as claimed in claim 1, wherein:
a speed at which said first free lever end moves relative to said substrate by said actuator assembly exerting said actuation force on said elongate coupling is at least substantially solely controlled by external forces that are exerted on said elongate coupling.
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10. A system, as claimed in claim 1, wherein:
an acceleration of said first free lever end relative to said substrate by said actuator assembly exerting said actuation force on said elongate coupling is at least substantially solely controlled by external forces that are exerted on said elongate coupling.
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11. A system, as claimed in claim 1, wherein:
said stiffness of said elongate coupling is such that said elongate coupling undergoes at least substantially no elastic deformation when actuator assembly exerts said actuation force on said elongate coupling.
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12. A system, as claimed in claim 1, wherein:
said component of said actuation force that is along said first path is at least about 20 μ
N.
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13. A system, as claimed in claim 1, further comprising:
a mirror microstructure interconnected with a portion of said lever that is movable relative to said substrate.
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14. A microelectromechanical system that comprises:
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a substrate;
a lever comprising movably interconnected with said substrate at a first location and a first free lever end that is moveable at least generally away from said substrate;
an actuator assembly interconnected with said substrate for movement along a first path; and
an elongate coupling comprising a first coupling end attached to said actuator assembly and a second coupling end attached to said lever, wherein said elongate coupling comprises first and second structural layers that are disposed in spaced relation and rigidly interconnected at a plurality of locations between said first and second coupling ends, and wherein said actuator generates an actuation force to move said first free lever end relative to said substrate by a movement of said actuator assembly along said first path. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26)
said actuator assembly comprises at least one actuator. -
16. A system, as claimed in claim 14, further comprising:
a displacement multiplier disposed between said actuator assembly and said coupling such that said actuator assembly is indirectly interconnected with said elongate coupling.
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17. A system, as claimed in claim 14, wherein:
said first path is at least generally parallel with said substrate.
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18. A system, as claimed in claim 14, wherein:
said actuator assembly moves in a first direction along said first path to exert a first said actuation force on said elongate coupling, and moves in a second direction along said first path to exert a second said actuation force on said elongate coupling, said first direction being opposite said second direction.
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19. A system, as claimed in claim 14, wherein:
said elongate coupling has a length of at least about 1,300 microns.
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20. A system, as claimed in claim 14, wherein:
a buckle strength of said elongate coupling between said first and second coupling ends is greater than a maximum magnitude of a component of said actuation force that is directed along said first path.
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21. A system, as claimed in claim 20, wherein:
a movement of said first free lever end relative to said substrate by said actuator assembly exerting said actuation force on said elongate coupling is at least substantially solely controlled by external forces that are exerted on said elongate coupling.
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22. A system, as claimed in claim 14, wherein:
a speed at which said first free lever end moves relative to said substrate by said actuator assembly exerting said actuation force on said elongate coupling is at least substantially solely controlled by external forces that are exerted on said elongate coupling.
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23. A system, as claimed in claim 22, wherein:
an acceleration of said first free lever end relative to said substrate by said actuator assembly exerting said actuation force on said elongate coupling is at least substantially solely controlled by external forces that are exerted on said elongate coupling.
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24. A system, as claimed in claim 20, wherein:
said stiffness of said elongate coupling is such that said elongate coupling undergoes at least substantially no elastic deformation when actuator assembly exerts said actuation force on said elongate coupling.
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25. A system, as claimed in claim 20, wherein:
said component of said actuation force that is along said first path is at least about 20 μ
N.
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26. A system, as claimed in claim 14, further comprising:
a mirror microstructure interconnected with a portion of said lever that is movable relative to said substrate.
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Specification