Method and apparatus for dynamically monitoring system components in an advanced process control (APC) framework

• US 6,831,555 B1
• Filed: 03/05/2002
• Issued: 12/14/2004
• Est. Priority Date: 03/05/2002
• Status: Expired due to Fees

• Current Assignee: GlobalFoundries, Inc.
• Original Assignee: Advanced Micro Devices, Inc.
• Inventors: Miller, Michael Lee, Coss, Elfido Jr.
• Primary Examiner(s): Pope, Daryl C.
• Application Number:
  US10/090,692
• Time in Patent Office: 1,015 Days
• Field of Search: 340/506, 340/516, 340/3.1, 340/3.21, 700/176, 700/121
• US Class Current: 340/506
• CPC Class Codes: G05B 23/0289 Reconfiguration to prevent failure, e.g. usually as a reaction to incipient failure detection

Abstract

A method and system for monitoring a performance of at least one system component of a manufacturing system. At least one event that can occur within the system is defined. It is determined whether the at least one event has occurred within the system, and altering a frequency at which the at least one system component is monitored providing the at least one event has occurred within the system.

Claims

1. A method for monitoring a performance of at least one system component of a manufacturing system, comprising:

determining whether the manufacturing system has been restarted from a previous shutdown of the system; and

altering a frequency at which the at least one system component is monitored in response to determining that the manufacturing system has been restarted from a previous shutdown of the system.

2. The method of claim 1, wherein altering a frequency at which the at least one system component is monitored further comprises:

increasing the frequency in which the at least one system component is monitored in response to determining that the manufacturing system has been restarted from a previous shutdown of the system.

3. The method of claim 1, wherein altering a frequency at which the at least one system component is monitored further comprises:

altering a frequency at which the at least one system component is monitored for a preset time period following the occurrence of the manufacturing system being restarted from a previous shutdown of the system.

4. The method of claim 1, wherein defying at least one event that can occur within the system further comprises:

defining at least one event as restarting the manufacturing system from a previous shutdown of the system.

5. The method of claim 1, wherein defining at least one event that can occur within the system further comprises:

defining at least one event as a fault condition occurring with the at least one system component.

6. The method of claim 1, wherein altering a frequency at which the at least one system component is monitored further comprises:

causing the at least one system component to run a diagnostic test periodically at a first predefined periodic interval as opposed to a second predefined periodic interval, the first predefined periodic interval being shorter than the second predefined periodic interval.

7. The method of claim 1, further comprising:

defining a predefined action to be performed in response to the occurrence of the manufacturing system being restarted from a previous shutdown of the system.

8. The method of claim 7, further comprising:

defining a frequency of occurrence for the predefined action.

9. A method for monitoring a performance of at least one system component of a manufacturing system, comprising:

defining at least one event that can occur within the system;

determining whether the at least one event has occurred within the system;

altering a frequency at which the at least one system component is monitored providing the at least one event has occurred within the system;

defining a predefined action to be performed in response to the occurrence of the at least one event; and

defining at least one diagnostic test to be performed by the at least one system component in response to the occurrence of the at least one event.

10. A manufacturing system, comprising:

at least one system component; and

a monitoring unit adapted to monitor the performance of the at least one system component, determine whether the manufacturing system has been restarted from a previous shutdown of the system, and alter a frequency at which the at least one system component is monitored in response to determining that the manufacturing system has been restarted from a previous shutdown of the system.

11. The system of claim 10, wherein the monitoring unit is further adapted to increase the frequency in which the at least one system component is monitored in response to determining that the manufacturing system has been restarted from a previous shutdown of the system.

12. The system of claim 10, wherein the monitoring unit is further adapted to alter the frequency at which the at least one system component is monitored for a preset time period following the occurrence of the manufacturing system being restarted from a previous shutdown of the system.

13. The system of claim 10, wherein the monitoring unit is further adapted to define at least one event as restarting the manufacturing system from a previous shutdown of the system.

14. The system of claim 10, wherein the monitoring unit is further adapted to define at least one event as a fault condition occurring with the at least one system component.

15. The system of claim 10, wherein the monitoring unit is further adapted to cause the at least one system component to run a diagnostic test periodically at a first predefined periodic interval as opposed to a second predefined periodic interval, the fist predefined periodic interval being shorter than the second predefined periodic interval.

16. The system of claim 10, wherein the monitoring unit is further adapted to define a predefined action to be performed in response to the occurrence of the manufacturing system being restarted from a previous shutdown of the system.

17. The system of claim 16, wherein the monitoring unit is further adapted to define a frequency of occurrence for the predefined action.

18. The system of claim 16, wherein the monitoring unit is further adapted to define at least one diagnostic test to be performed by the at least one system component in response to the occurrence of the manufacturing system being restarted from a previous shutdown of the system.

19. A system for monitoring a performance of at least one system component of a manufacturing system, comprising:

means for determining whether the manufacturing system has been restarted from a previous shutdown of the system; and

means for altering a frequency at which the at least one system component is monitored in response to determining that the manufacturing system has been restarted from a previous shutdown of the system.