Magnetic sensor having adjusted specific resistance distribution of first magnetic layer of free magnetic layer of multi-layered ferri-structure
First Claim
1. A magnetic sensor including a laminate comprising an antiferromagnetic layer, a pinned magnetic layer formed in contact with said antiferromagnetic layer, and a free magnetic layer formed in an opposing relation to said pinned magnetic layer with a nonmagnetic material layer interposed between said free magnetic layer and said pinned magnetic layer,said free magnetic layer being of a multilayered ferri-structure comprising a second magnetic layer formed in contact with an interface between said free magnetic layer and said nonmagnetic material layer, and a first magnetic layer formed in an opposing relation to said second magnetic layer with a nonmagnetic intermediate layer interposed therebetween, said first magnetic layer including an area which contains an element X wherein X represents at least one element selected from among Cr, Ti, V, Zr, Nb, Mo, Hf, Ta and W and which is present in position toward a side of said nonmagnetic intermediate layer from a side near a surface of said first magnetic layer away from an interface between said first magnetic layer and said nonmagnetic intermediate layer, and an area which is partly located in a region from the interface between said first magnetic layer and said nonmagnetic intermediate layer toward the surface of said first magnetic layer away from the interface and which does not contain the element X.
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Accused Products
Abstract
A first magnetic layer includes an area which contains an element X (e.g., Cr) and is present in position toward the side of a nonmagnetic intermediate layer from the side near an opposite surface of the first magnetic layer away from an interface between the first magnetic layer and the nonmagnetic intermediate layer, and an area which is partly located in a region from the interface between the first magnetic layer and the nonmagnetic intermediate layer toward the opposite surface of the first magnetic layer and which does not contain the element X. Such an arrangement is able to improve a resistance change rate, to increase a coupling magnetic field based on the RKKY interaction, and to realize satisfactory control of magnetization of a free magnetic layer.
23 Citations
62 Claims
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1. A magnetic sensor including a laminate comprising an antiferromagnetic layer, a pinned magnetic layer formed in contact with said antiferromagnetic layer, and a free magnetic layer formed in an opposing relation to said pinned magnetic layer with a nonmagnetic material layer interposed between said free magnetic layer and said pinned magnetic layer,
said free magnetic layer being of a multilayered ferri-structure comprising a second magnetic layer formed in contact with an interface between said free magnetic layer and said nonmagnetic material layer, and a first magnetic layer formed in an opposing relation to said second magnetic layer with a nonmagnetic intermediate layer interposed therebetween, said first magnetic layer including an area which contains an element X wherein X represents at least one element selected from among Cr, Ti, V, Zr, Nb, Mo, Hf, Ta and W and which is present in position toward a side of said nonmagnetic intermediate layer from a side near a surface of said first magnetic layer away from an interface between said first magnetic layer and said nonmagnetic intermediate layer, and an area which is partly located in a region from the interface between said first magnetic layer and said nonmagnetic intermediate layer toward the surface of said first magnetic layer away from the interface and which does not contain the element X.
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4. A magnetic sensor including a laminate comprising an antiferromagnetic layer, a pinned magnetic layer formed in contact with said antiferromagnetic layer, and a free magnetic layer formed in an opposing relation to said pinned magnetic layer with a nonmagnetic material layer interposed between said free magnetic layer and said pinned magnetic layer,
said free magnetic layer being of a multilayered ferri-structure comprising a second magnetic layer formed in contact with an interface between said free magnetic layer and said nonmagnetic material layer, and a first magnetic layer formed in an opposing relation to said second magnetic layer with a nonmagnetic intermediate layer interposed therebetween, said first magnetic layer containing an element X wherein X represents at least one element selected from among Cr, Ti, V, Zr, Nb, Mo, Hf, Ta and W, a content of the element X being larger on a side near an a surface of said first magnetic layer away from an interface between said first magnetic layer and said nonmagnetic intermediate layer than on a side near the interface between said first magnetic layer and said nonmagnetic intermediate layer.
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9. A magnetic sensor including a laminate comprising an antiferromagnetic layer, a pinned magnetic layer formed in contact with said antiferromagnetic layer, and a free magnetic layer formed in an opposing relation to said pinned magnetic layer with a nonmagnetic material layer interposed between said free magnetic layer and said pinned magnetic layer,
said free magnetic layer being of a multilayered ferri-structure comprising a second magnetic layer formed in contact with an interface between said free magnetic layer and said nonmagnetic material layer, and a first magnetic layer formed in an opposing relation to said second magnetic layer with a nonmagnetic intermediate layer interposed therebetween, said first magnetic layer being made up of at least two magnetic layers, one of said two magnetic layers, which is positioned on a side near a surface of said first magnetic layer away from an interface between said first magnetic layer and said nonmagnetic intermediate layer, being formed of a magnetic material containing an element X wherein X represents at least one element selected from among Cr, Ti, V, Zr, Nb, Mo, Hf, Ta and W, the other of said two magnetic layers, which is positioned on a side contacting the interface between said first magnetic layer and said nonmagnetic intermediate layer, being formed of a magnetic material not containing the element X.
Specification