Inspection system for circuit patterns and a method thereof
First Claim
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1. An inspection system comprising:
- a stage which mounts an object to be inspected and moves in a plane;
an image detecting means for detecting an image of said object mounted on said stage successively moving in a plane and successively outputting an image signal;
an image signal receiving means for receiving said image signal successively outputted from said image detecting means and outputting said received image signal;
an image processing means which includes a plurality of image processing units which receive successive portions of said outputted image signal from said image signal receiving means, and process said received outputted image signal to detect defects in said object in parallel; and
a data unifying means for unifying data which is processed by said image processing means in parallel, wherein said image receiving means outputs said received image signal by selectively distributing said successive portions of said received image signal to said plurality of image processing units of said image processing means.
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Abstract
In order to provide a high-speed, inexpensive inspection system that has a short development period, that is flexible, and that allow algorithms to be easily changed, a PC equipped with an image input feature is used to capture an image detected by a line image sensor, this detected image is transferred to a plurality of PCs connected by a LAN, and defects are detected using software processing on the plurality of PCs.
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Citations
8 Claims
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1. An inspection system comprising:
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a stage which mounts an object to be inspected and moves in a plane;
an image detecting means for detecting an image of said object mounted on said stage successively moving in a plane and successively outputting an image signal;
an image signal receiving means for receiving said image signal successively outputted from said image detecting means and outputting said received image signal;
an image processing means which includes a plurality of image processing units which receive successive portions of said outputted image signal from said image signal receiving means, and process said received outputted image signal to detect defects in said object in parallel; and
a data unifying means for unifying data which is processed by said image processing means in parallel, wherein said image receiving means outputs said received image signal by selectively distributing said successive portions of said received image signal to said plurality of image processing units of said image processing means. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification