Particle deposition system with enhanced speed and diameter accuracy

• US 6,833,028 B1
• Filed: 02/11/2002
• Issued: 12/21/2004
• Est. Priority Date: 02/09/2001
• Status: Expired due to Fees

• Current Assignee: The Scatter Works Incorporated
• Original Assignee: The Scatter Works Incorporated
• Inventors: Scheer, Craig A., Stover, John C.
• Primary Examiner(s): Mayes, Melvin C.
• Assistant Examiner(s): TADESSE, YEWEBDAR T
• Application Number:
  US10/074,354
• Time in Patent Office: 1,044 Days
• Field of Search: 118/308, 118/309, 118/302, 118/693, 118/319, 118/320, 427/99, 427/585, 427/294
• US Class Current: 118/309
• CPC Class Codes: G01N 15/065 using condensation nuclei counters
• CPC Class Codes: H01L 21/6715 Apparatus for applying a liquid, a resin, an ink or the like H01L21/67126 takes precedence
• CPC Class Codes: H01L 21/67253 Process monitoring, e.g. flow or thickness monitoring

Abstract

In a method for depositing particles onto a substrate a flow of gas containing particles is provided along a flow path that bypasses a deposition chamber. The flow path may direct the flow of the gas containing the particles to a vacuum. To deposit particles onto a substrate in the deposition chamber, the flow path of the gas containing the particles is diverted into the deposition chamber so that particles are deposited onto the substrate. After a desired amount of particles have been deposited onto the substrate, the flow path of the flow of the gas containing the particles is changed to the flow path that bypasses the deposition chamber. A particle deposition system and a method for maintaining particle diameter during deposition of particles onto a substrate also are described.

Claims

1. A particle deposition system, comprising:

a deposition chamber having an inlet;

a conduit coupled to the inlet of the deposition chamber, the conduit being in flow communication with a source of gas containing particles, and the conduit having a first branch and a second branch;

a particle counter disposed in the first branch of the conduit;

an orifice disposed in the second branch of the conduit; and

a vacuum coupled in flow communication with the first branch of the conduit and the second branch of the conduit.

2. The system of claim 1, wherein the first branch of the conduit is closer to the source of gas containing particles than the second branch of the conduit.

3. The system of claim 1, further comprising:

a first solenoid disposed in the first branch of the conduit between the particle counter and the vacuum; and

a second solenoid disposed in the second branch of the conduit between the orifice and the vacuum.

4. The system of claim 3, further comprising:

an orifice disposed in the first branch of the conduit between the particle counter and the first solenoid.

5. The system of claim 1, wherein the source of the gas containing the particles is an atomizer.

6. The system of claim 5, further comprising a differential mobility analyzer in flow communication with the atomizer.

7. The system of claim 6, further comprising an orifice disposed before the differential mobility analyzer and an orifice disposed after the differential mobility analyzer.

8. The system of claim 7, further comprising a first pair of pressure sensors for measuring a pressure differential across the orifice disposed before the differential mobility analyzer and a second pair of pressure sensors for measuring a pressure differential across the orifice disposed after the differential mobility analyzer.

9. The system of claim 1, wherein the conduit has a third branch, the third branch being in flow communication with the vacuum.

10. The system of claim 9, further comprising:

an orifice disposed in the third branch of the conduit.

11. The system of claim 10, further comprising:

a third solenoid disposed in the third branch of the conduit between the orifice and the vacuum.

12. The system of claim 1, wherein the conduit is in flow communication with a source of makeup gas.

13. A particle deposition system, comprising:

an atomizer for providing a flow of gas containing particles;

a flow control device coupled in flow communication with the atomizer;

a differential mobility analyzer coupled in flow communication with the flow control device; and

a deposition chamber coupled in flow communication with the flow control device and the differential mobility analyzer, wherein when the particles in the flow of the gas containing the particles are to be filtered by the differential mobility analyzer, the flow control device directs the flow of the gas containing the particles toward the differential mobility analyzer, and when the particles in the flow of the gas containing the particles are not to be filtered by the differential mobility analyzer, the flow control device directs the flow of the gas containing the particles toward the deposition chamber.

14. The particle deposition system of claim 13, wherein the flow control device is a three-way solenoid.

15. The particle deposition system of claim 13, wherein when the particles in the flow of the gas containing the particles have a size that is not larger than 1.5 microns, the flow control device directs the flow of the gas containing the particles toward the differential mobility analyzer, and when the particles in the flow of the gas containing the particles have a size that is larger than 1.5 microns, the flow control device directs the flow of the gas containing the particles toward the deposition chamber.