Method for forming fine patterns in semiconductor device

• US 6,833,326 B2
• Filed: 01/08/2003
• Issued: 12/21/2004
• Est. Priority Date: 03/26/2002
• Status: Expired due to Fees

• Current Assignee: Hynix Semiconductor Incorporated (SK Hynix Inc.)
• Original Assignee: Hynix Semiconductor Incorporated (SK Hynix Inc.)
• Inventors: Hyun, Yoon Suk, Koh, Cha Won
• Primary Examiner(s): Pham, Long
• Assistant Examiner(s): Trinh, (Vikki) Hoa B.
• Application Number:
  US10/338,516
• Publication Number:
  US 20030186547A1
• Time in Patent Office: 713 Days
• Field of Search: 438/725, 438/681, 438/689, 438/700, 430/314
• US Class Current: 438/725
• CPC Class Codes: G03F 7/0045 with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
• CPC Class Codes: G03F 7/095 having more than one photosensitive layer G03F7/075 takes precedence
• CPC Class Codes: G03F 7/405 Treatment with inorganic or organometallic reagents after imagewise removal
• CPC Class Codes: H01L 21/0273 characterised by the treatment of photoresist layers
• CPC Class Codes: H01L 21/32139 using masks

Abstract

Disclosed is a method of forming a fine pattern in a semiconductor device using a photolithography process, which comprises: coating a photoresist layer for an I-line and a positive type ArF photoresist layer on a semiconductor substrate that includes a conductive layer; performing exposure and a first baking process on the resultant substrate by using an etch-mask of a desired pattern to produce alcohol radicals (OH⁻) or carboxyl acid (COOH) in the positive type ArF photoresist layer, in which a silylation reaction can be produced; removing the etch-mask; performing a development process to the resultant structure to form a first photoresist pattern; performing exposure and a second baking process on the substrate that includes the first photoresist pattern; performing a silylation process to the substrate to which the second baking process has been performed, by using an HMDS to form a silicon oxide layer on the surface of the first photoresist pattern through reaction between the alcohol radicals (OH⁻) or the carboxyl acid (COOH) and the HMDS; performing a dry development process to the photoresist layer for the I-line by using the first photoresist pattern along with the silicon oxide layer as an etch-mask in order to form a second photoresist pattern; and etching the conductive layer by using the first and second photoresist patterns together with the silicon oxide layer as an etch-mask in order to form bit-lines.

Claims

1. A method for forming fine patterns in a semiconductor device, comprising the steps of:

coating a photoresist layer for an I-line and a positive type ArF photoresist layer on a semiconductor substrate that includes a conductive layer;

performing exposure and a first baking process on the resultant substrate by using an etch-mask of a desired pattern to produce alcohol radicala (OH⁻

) or carboxyl acid (COOH) in the positive type ArF photoresist layer, in which a silylation reaction can be produced;

removing the etch-mask;

performing a development process to the resultant structure to form a first photoresist pattern;

performing exposure and a second baking process on the substrate that includes the first photoresist pattern;

performing a silylation process to the substrate, to which the second baking process has been performed, by using an HMDS to form a silicon oxide layer on the surface of the first photoresist pattern through reaction between the alcohol radicals (OH⁻

) or the carboxyl acid (COOH) and the HMDS;

performing a dry development process to the photoresist layer for the I-line by using the first photoresist pattern together with the silicon oxide layer as an etch-mask in order to form a second photoresist pattern; and

etching the conductive layer by using the first and second photoresist patterns along with the silicon oxide layer as an etch-mask in order to form bit-lines.

2. The method for forming fine patterns according to claim 1, wherein the substrate is vapor treated, prior to the coating of the photoresist layer for the I-line.

3. The method for forming fine patterns according to claim 1, wherein the photoresist layer for the I-line is coated to a thickness of 0.2 to 1.5 μ

m, and the positive type ArF photoresist layer is coated to a thickness of 0.05 to 0.2 μ

m.

4. The method for forming fine patterns according to claim 1, further comprising a step of performing a hard baking process on the photoresist layer for the I-line for 90 seconds at a temperature of 200°

C., prior to the coating of the positive type ArF photoresist layer.

5. The method for forming fine patterns according to claim 1, further comprising a step of performing a soft baking for 90 seconds at a temperature of 110°

C., after the coating of the positive type ArF photoresist layer.

6. The method for forming fine patterns according to claim 1, wherein the development process is performed for 60 seconds using a TMAH solution.

7. The method for forming fine patterns according to claim 6, wherein the concentration of the TMAH solution is 0.1 to 10%.

8. The method for forming fine patterns according to claim 1, wherein the ArF exposure process is performed while supplying energy of 5 to 50 mJ/cm² during the step of performing the exposure and the second baking process to the substrate that includes the first photoresist pattern.

9. The method for forming fine patterns according to claim 1, wherein the first and second baking processes are performed for 90 seconds at a temperature of 110°

C.

10. The method for forming fine patterns according to claim 1, wherein the silylation process is performed for 90 seconds at a temperature of 120°

C.

11. The method for forming fine patterns according to claim 1 or claim 10, wherein the silyalating agent used in the silylation process is any one compound selected from a group composed of hexamethyl disilazane, tetramethyl disilazane, bisdimethylamino dimethylsilane, bisdimethylamino methylsilane, dimethylsilyl dimethylamine, dimethylsilyl diethylamine, trimethylsilyl dimethylamine, trimethylsilyl diethylamine, and dimethylamino pentamethyldisilane.

12. The method for forming fine patterns according to claim 1, wherein the dry development process is performed using an oxygen plasma.

13. The method for forming fine patterns according to claim 1 or claim 12, the dry development process is performed while maintaining an upper electrode at 500 watts (W) and a lower electrode at 100 watts (W), and applying a power bias of 75 watts (W) and supplying oxygen gas of 35 sccm at a temperature of 30°

C. and a pressure of 5 mTorr.