Ceramic based multi-site electrode arrays and methods for their production

• US 6,834,200 B2
• Filed: 10/19/2001
• Issued: 12/21/2004
• Est. Priority Date: 10/19/2000
• Status: Expired due to Term

• Current Assignee: Drexel University
• Original Assignee: Philadelphia Health and Education Corp (Drexel University)
• Inventors: Chapin, John K., Moxon, Karen Anne
• Primary Examiner(s): Cohen, Lee S.
• Application Number:
  US09/999,601
• Publication Number:
  US 20020106496A1
• Time in Patent Office: 1,159 Days
• Field of Search: 600/373, 600/377, 600/378, 607/116, 607/117
• US Class Current: 600/373
• CPC Class Codes: A61B 5/24 Detecting, measuring or recording bioelectric or biomagnetic signals of the body or parts thereof
• CPC Class Codes: A61B 5/685 Microneedles
• CPC Class Codes: A61N 1/0529 Electrodes for brain stimulation
• CPC Class Codes: A61N 1/0551 Spinal or peripheral nerve electrodes
• CPC Class Codes: A61N 1/3605 Implantable neurostimulators for stimulating central or peripheral nerve system
• CPC Class Codes: H05K 1/0306 Inorganic insulating substrates, e.g. ceramic, glass
• CPC Class Codes: H05K 1/117 Pads along the edge of rigid circuit boards, e.g. for pluggable connectors
• CPC Class Codes: Y10T 428/24926 including ceramic, glass, porcelain or quartz layer

Abstract

Ceramic based multi-site electrode arrays of a polished ceramic substrate patterned with recording sites and bonding pads which are connected via conducting lines are provided. Methods for producing these electrode arrays and using the electrode arrays to record or stimulate multiple neurons in a mammal are also provided.

Claims

1. A ceramic based multi-site electrode array for recording and stimulating mammalian central nervous system tissue in vivo comprising a polished ceramic substrate patterned with recording sites and bonding pads which are connected via conducting lines and an insulating layer encasing the conducting lines in inert ceramic but leaving exposed the recording sites.

2. The ceramic based multi-site electrode array of claim 1 wherein the insulating layer comprises Al₂O₃.

3. The ceramic based multi-site electrode array of claim 2 wherein the Al₂O₃ is ionized using a process of ion-beam assisted deposition prior to layering over the conducting lines.

4. A method for recording or stimulating multiple neurons simultaneously in mammal comprising implanting the ceramic based multi-site electrode array of claim 1 into a mammal.

5. The ceramic based multi-site electrode array of claim 1 produced by a method comprising:

(a) patterning by reverse photolithography the ceramic substrate with resist features that define recording sites, bonding pads and conducting lines connecting the recording sites and bonding pads;

(b) applying a metal conductor to the ceramic substrate patterned with the resist features defining the recording sites, bonding pads and conducting lines connecting the recording sites anda bonding pads; and

(c) submersing the ceramic substrate of step (b) in a photoresist stripper which lifts off unwanted overlying metal and leaves behind metal on the ceramic substrate defining the recording sites, conducting lines and bonding pads; and

(d) applying an insulating layer to the metal defining the conducting lines of the ceramic substrate.