Characterizing in-situ deformation of hard pellicle during fabrication and mounting with a sensor array

• US 6,834,549 B2
• Filed: 04/03/2003
• Issued: 12/28/2004
• Est. Priority Date: 04/03/2003
• Status: Expired due to Fees

• Current Assignee: Intel Corporation
• Original Assignee: Intel Corporation
• Inventors: Paul, Goutam, Shu, Emily Yixie
• Primary Examiner(s): NOORI, MAX H
• Application Number:
  US10/407,902
• Publication Number:
  US 20040194556A1
• Time in Patent Office: 635 Days
• Field of Search: 737/67, 737/68, 737/60, 737/62, 737/63, 737/81
• US Class Current: 73/768
• CPC Class Codes: G01L 1/22 using resistance strain gauges
• CPC Class Codes: G01L 5/00 Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
• CPC Class Codes: G03F 1/62 Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
• CPC Class Codes: G03F 1/64 characterised by the frames, e.g. structure or material, including bonding means therefor
• CPC Class Codes: G03F 1/82 Auxiliary processes, e.g. cleaning or inspecting
• CPC Class Codes: G03F 7/70591 Testing optical components
• CPC Class Codes: G03F 7/70983 Optical system protection, e.g. pellicles or removable covers for protection of mask

Abstract

A system comprising a reticle, a pellicle and a plurality of sensors attached to at least one of the reticle or pellicle. The sensors are configured to sense in-situ strains on the pellicle as the pellicle is mounted to the reticle or frame.

Claims

1. A system comprising:

a pellicle to be used in photolithography;

a plurality of sensors to measure surface strain of the pellicle as the pellicle is mounted to an object;

a processor to couple to the sensors and to process data from the sensors; and

a pellicle mounter to mount the pellicle according to the processed data to minimize pellicle mounting error.

2. The system of claim 1, wherein the sensors comprise strain gages.

3. The system of claim 1, wherein the sensors comprise piezoelectric transducers.

4. The system of claim 1, wherein the sensors comprise microelectromechanical systems (MEMS).

5. The system of claim 1, wherein the sensors are attached to the pellicle.

6. The system claim 1, wherein the sensors are attached proximate to an outer edge of the pellicle.

7. The system of claim 1. wherein the sensors are used in orthogonal pairs to acquire two directional in-plane strains.

8. The system of claim 1, wherein the sensors are attached to a reticle.

9. The system of claim 1, wherein the sensors are attached to a frame mounted to the pellicle.

10. The system of claim 1, wherein each sensor is about two to four micrometers in thickness.

11. The system of claim 1, wherein the sensors are operative to measure in-situ distributed forces on the pellicle.

12. The system of claim 1, wherein the sensors are operative to monitor material deformation.

13. The system of claim 1, further comprising a mechanical stress model to map surface strain across the pellicle and to reduce pellicle mounting error.

14. The system of claim 1, wherein the object is a reticle.

15. The system of claim 1, wherein the object is a frame.

21. The system of claim 1, further comprising a feedback and control unit operative to collect data from the processor.

34. The system of claim 21, wherein the feedback and control unit is operative to provide feedback to a pellicle mounting machine to reduce pellicle mounting error.

16. A mask pellicle system comprising:

a plurality of sensors to measure surface deflection of the mask pellicle as the mask pellicle is mounted to an object;

a processor to process deflection data from the sensors and coupled to the sensors; and

a feedback and control unit to collect data from the processor and reduce mask pellicle mounting error.

17. The system of claim 16, wherein the processor is operative to use a mechanical stress model to map surface strain across the mask pellicle.

35. The system of claim 16, wherein the plurality of sensors are distributed across the mask pellicle.

36. The system of claim 17, wherein the mechanical stress model comprises a finite element model (FEM) simulation.

18. A system to reduce pellicle mounting error comprising:

a reticle;

a pellicle; and

a plurality of sensors attached to at least one of the reticle or pellicle, wherein the sensors are operative to sense forces on the pellicle as the pellicle is mounted to the reticle;

an array processor to couple to the sensors and to process measurements from the sensors; and

a mounter control to couple to the array processor, the mounter control being operative to adjust pellicle mounting based on processed measurements from the array processor.

19. The system of claim 18, wherein the sensors are operative to sense any of the following forces on the pellicle as the pellicle is mounted to the reticle:

in-situ forces;

in-plane displacement forces;

deflection forces;

distributed mounting forces; and

material deformation forces.

20. The system of claim 19, wherein the mounter control is operative to reduce pellicle mounting error based on the processed measurements.

22. The system of claim 18, wherein the pellicle is made of fused silica.

23. The system of claim 18, wherein the reticle is made of quartz.

24. The system of claim 18, further comprising a frame supporting the pellicle.

25. The system of claim 18, wherein the sensors are operative to measure deformation of the pellicle.

26. A method comprising:

mounting a pellicle to an object; and

sensing in-situ forces on the pellicle with a plurality of strain-gage sensors during the mounting.

27. The method of claim 26, wherein the object is a reticle.

28. The method of claim 26, wherein the object is a frame.

29. The method of claim 26, wherein mounting the pellicle to the object comprises applying an adhesive and applying a force to the pellicle and object.

30. The method of claim 26, further comprising processing the sensed in-situ forces to reduce deformation.

32. The method of claim 26, further comprising attaching a plurality of sensors to the pellicle before mounting.

33. The method of claim 26, further comprising attaching a plurality of sensors to the object before mounting.

31. A method comprising:

mounting a pellicle to an object;

sensing in-situ forces on the pellicle with a plurality of sensors during the mounting; and

adjusting the mounting based on said sensed forces.