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Micro-electromechanical device that incorporates covering formations for actuators of the device

  • US 6,834,939 B2
  • Filed: 11/17/2003
  • Issued: 12/28/2004
  • Est. Priority Date: 11/23/2002
  • Status: Expired due to Fees
First Claim
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1. A micro-electromechanical device that comprisesa substrate that incorporates drive circuitry;

  • an elongate actuator that has a fixed end that is connected to the substrate so that the actuator can receive an electrical signal from the drive circuitry and a movable end, the actuator being configured so that the movable end is displaced relative to the substrate on receipt of the electrical signal;

    a motion-transmitting structure that is fast with the movable end of the actuator, the motion transmitting structure being connected to a working member so that movement of the actuator is translated to the working member; and

    a covering formation that is positioned on the substrate so that the substrate, the covering formation and the motion-transmitting structure define an air chamber, the actuator being positioned within the air chamber.

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  • 3 Assignments
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