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Method of fabricating a magnetic element with insulating veils

  • US 6,835,423 B2
  • Filed: 01/22/2003
  • Issued: 12/28/2004
  • Est. Priority Date: 04/28/2000
  • Status: Expired due to Term
First Claim
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1. A method of fabricating a magnetic element comprising the steps of:

  • providing a substrate element having a surface;

    forming a base metal layer on an uppermost surface of the substrate;

    forming a first electrode on the base metal layer, the first electrode including a ferromagnetic layer;

    forming a second electrode positioned spaced apart from the first electrode, the second electrode including a ferromagnetic layer;

    forming a spacer layer located between the ferromagnetic layer of the first electrode and the ferromagnetic layer of the second electrode, the base metal layer, the first electrode, the spacer layer and the second electrode defining a plurality of layers formed parallel to the surface of the substrate element;

    etching the plurality of layers to define a magnetic element, the step of etching comprising forming a conductive veil perpendicular to the plurality of layers formed on the substrate surface and in contact with the first electrode, the second electrode and the spacer layer of the magnetic element; and

    electrically isolating the first electrode and the second electrode by transforming the conductive veil in a vertical plane relative to the horizontal layers formed on the substrate to an insulative veil.

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