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Integrated circuit with a MOS capacitor

  • US 6,835,628 B2
  • Filed: 11/05/2001
  • Issued: 12/28/2004
  • Est. Priority Date: 11/05/2001
  • Status: Expired due to Fees
First Claim
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1. A method of forming an integrated circuit, the method comprising:

  • forming an oxide layer on and in contact with a surface of a substrate, the substrate having a plurality of isolation islands, wherein at least one isolation island is used in forming a semiconductor device;

    patterning the oxide layer to expose predetermined areas of the surface of the substrate;

    depositing a nitride layer overlaying the oxide layer and the exposed surface areas of the substrate, wherein the nitride layer is in contact with the oxide layer and all of the exposed surface areas created by the patterning of the oxide layer;

    implanting ions through the nitride layer, wherein the nitride layer is an implant screen for the implanted ions; and

    using the nitride layer in at least one of the isolation islands as a capacitor dielectric in forming a capacitor.

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