Optical microswitch
First Claim
1. An optical microswitch for use with a laser beam that extends along a path comprising a body having an inlet port adapted to receive the laser beam and a plurality of outlet ports, a plurality of mirrors carried by the body, a plurality of micromotors carried by the body, microattachment means for rigidly coupling the plurality of mirrors to the respective plurality of micromotors whereby the micromotors selectively move the mirrors from a first position out of the path of the laser beam to a second position into the path of the laser beam to direct the laser beam to one of the outlet ports, each of the micromotors having at least one electrostatically-driven comb drive assembly therein for moving the respective mirror to one of the first and second positions, and a controller electrically coupled to the micromotors for providing control signals to the micromotors.
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Accused Products
Abstract
An optical microswitch for use with a laser beam that extends along a path comprising a body having an inlet port adapted to receive the laser beam and a plurality of outlet ports. A plurality of mirrors coupled to a plurality of micromotors carried by the body. The micromotors selectively move the mirrors from a first position out of the path of the laser beam to a second position into the path of the laser beam to direct the laser beam to one of the outlet ports. Each of the micromotors has at least one electrostatically-driven comb drive assembly therein for moving the respective mirror to one of the first and second positions. A controller is electrically coupled to the micromotors for providing control signals to the micromotors.
40 Citations
31 Claims
- 1. An optical microswitch for use with a laser beam that extends along a path comprising a body having an inlet port adapted to receive the laser beam and a plurality of outlet ports, a plurality of mirrors carried by the body, a plurality of micromotors carried by the body, microattachment means for rigidly coupling the plurality of mirrors to the respective plurality of micromotors whereby the micromotors selectively move the mirrors from a first position out of the path of the laser beam to a second position into the path of the laser beam to direct the laser beam to one of the outlet ports, each of the micromotors having at least one electrostatically-driven comb drive assembly therein for moving the respective mirror to one of the first and second positions, and a controller electrically coupled to the micromotors for providing control signals to the micromotors.
- 15. An optical microapparatus for use with a laser beam that extends along a path comprising a body having an inlet port adapted to receive the laser beam and a plurality of outlet ports, a plurality of reflectors carried by the body, a plurality of micromotors carried by the body, each of the micromotors having at least one electrostatically-driven comb drive assembly, microattachment means for rigidly coupling the plurality of reflectors to the respective plurality of micromotors and a controller electrically coupled to the micromotors for providing control signals to the micromotors whereby each of the micromotors selectively moves the respective reflector from a first position out of the path of the laser beam to a second position into the path of the laser beam for directing light from the laser beam to an outlet port.
Specification