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Increasing the dynamic range of a MEMS gyroscope

  • US 6,837,108 B2
  • Filed: 04/23/2002
  • Issued: 01/04/2005
  • Est. Priority Date: 04/23/2002
  • Status: Expired due to Fees
First Claim
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1. A method for increasing a dynamic range of a MEMS gyroscope, comprising in combination:

  • connecting a variable sense bias to at least one sense plate of the MEMS gyroscope, wherein the variable sense bias is operable to apply a sense bias voltage to the at least one sense plate; and

    adjusting the sense bias voltage to change a scale factor of the MEMS gyroscope based on an angular rate input detected by the MEMS gyroscope.

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