Electrostatically actuated valve

• US 6,837,476 B2
• Filed: 06/19/2002
• Issued: 01/04/2005
• Est. Priority Date: 06/19/2002
• Status: Expired due to Fees

• Current Assignee: Honeywell International Inc.
• Original Assignee: Honeywell International Inc.
• Inventors: Cabuz, Cleopatra, Cabuz, Eugen I.
• Primary Examiner(s): Look, Edward K.
• Assistant Examiner(s): Fristoe, Jr., John K.
• Application Number:
  US10/174,851
• Publication Number:
  US 20030234376A1
• Time in Patent Office: 930 Days
• Field of Search: 251/129.01, 251/129.03, 251/331, 137/625.48, 137/627.5
• US Class Current: 251/129.01
• CPC Class Codes: F15C 5/00 Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
• CPC Class Codes: F16K 31/02 electric F16K31/004 takes precedence; magnetic
• CPC Class Codes: F16K 99/0001 Microvalves microdevices B81B1/00; manufacture or treatment of devices or systems in or on a substrate B81C1/00; microfluidic structures B01L3/5027; micropumps F04B19/006
• CPC Class Codes: F16K 99/0015 Diaphragm or membrane valves
• CPC Class Codes: F16K 99/0028 Valves having multiple inlets or outlets
• CPC Class Codes: F16K 99/0051 using electrostatic means
• CPC Class Codes: Y10T 137/86879 Reciprocating valve unit
• CPC Class Codes: Y10T 137/87788 With valve or movable deflector at junction

Abstract

An electrostatically actuated valve that is relatively small, has relatively low fabrication costs, and consumes relatively low voltage and/or power. Normally closed, normally open, three (or more) way valves, and other configurations are contemplated. These electrostatically actuated valves are suitable for a wide variety of applications, including but not limited to, low power and wireless applications, for example.

Claims

1. An electrostatic actuated valve comprising:

a body forming a chamber;

the chamber having a first port and a second port;

a diaphragm mounted in the chamber, said diaphragm having a first position that restricts fluid from flowing between the first port and the second port, and a second position that allows fluid to flow between the first port and the second port;

a first electrode secured relative to the diaphragm;

a second electrode secured relative to the body; and

wherein the diaphragm is electrostatically actuated between the first position and the second position when a voltage is applied between the first electrode and the second electrode; and

wherein the chamber has a first opposing wall and a second opposing wall, the first opposing wall and the second opposing wall being configured such that the spacing between the first opposing wall and the second opposing wall is smaller in a first region of the chamber than in an adjacent second region, the diaphragm being mounted between the first opposing wall and the second opposing wall such that the diaphragm is electrostatically pulled toward the second electrode in a rolling action beginning in the first region.

2. An electrostatic actuated valve according to claim 1 wherein the diaphragm is elastically deformed when electrostatically pulled toward the second position, and at least substantially returns to the first position under an elastic restoring force when not electrostatically pulled toward the second position.

3. An electrostatic actuated valve according to claim 1 wherein:

the chamber has a first opposing wall and a second opposing wall, wherein the first port extends through the first opposing wall and into the chamber and the second port extends through the second opposing wall and into the chamber;

the diaphragm being mounted between the first opposing wall and the second opposing wall, and having at least one opening that is laterally offset from the first port in the first opposing wall when the diaphragm is positioned in a first position adjacent the first opposing wall;

the second electrode being secured relative to the second opposing wall;

wherein the diaphragm is electrostatically pulled toward the second opposing wall when a voltage is applied between the first electrode and the second electrode, thereby allowing fluid to flow between the first port and the second port via the at least one opening in the diaphragm.

4. An electrostatic actuated valve according to claim 1 wherein:

the chamber has a first opposing wall and a second opposing wall, wherein the first port extends through the first opposing wall and into the chamber and the second port extends through the first opposing wall and into the chamber;

the diaphragm being mounted between the first opposing wall and the second opposing wall, and covering the first port in the first opposing wall when the diaphragm is in the first position adjacent the first opposing wall;

the second electrode being secured relative to the second opposing wall;

wherein the diaphragm is electrostatically pulled toward the second opposing wall when a voltage is applied between the first electrode and the second electrode, thereby allowing fluid to flow between the first port and the second port.

5. An electrostatic actuated valve comprising:

a body forming a chamber;

the chamber having a first port and a second port, and a valve member that can be actuated between a first position and a second position to selectively allow fluid communication between the first port and the second port;

the valve member being electrostatically actuated wherein;

the chamber has a first opposing wall and a second opposing wall;

the first port extends through the first opposing wall and into the chamber and the second port extends through the first opposing wall and into the chamber;

the first opposing wall and the second opposing wall being configured such that the spacing between the first opposing wall and the second opposing wall is smaller near the edge of the chamber than near the center of the chamber; and

the diaphragm is mounted between the first opposing wall and the second opposing wall such that the diaphragm is electrostatically pulled toward the second electrode in a rolling action.

6. An electrostatic actuated valve according to claim 5 wherein a fluid passing between the first port and the second port is not substantially exposed to the electrostatic field that is produced when the valve member is electrostatically actuated.

7. An electrostatic actuated valve according to claim 6 wherein:

the valve member including a diaphragm that is mounted between the first opposing wall and the second opposing wall, and covering the first port in the first opposing wall when the diaphragm is in a first position adjacent the first opposing wall, the diaphragm having a first electrode;

a second electrode secured relative to the second opposing wall;

wherein the diaphragm is electrostatically pulled toward the second opposing wall when a voltage is applied between the first electrode and the second electrode, thereby allowing fluid to flow between the first port and the second port without being substantially exposed to the electrostatic field between the first electrode and the second electrode.

8. An electrostatic actuated valve comprising:

a body forming a chamber;

the chamber having a first opposing wall, a second opposing wall, a first port and a second port;

the first opposing wall and the second opposing wall being configured such that the spacing between the first opposing wall and the second opposing wall is smaller in a first region of the chamber than in an adjacent second region;

a diaphragm positioned between the first opposing wall and the second opposing wall and having a first position that allow fluid to flow between first port and the second port;

a first electrode secured relative to the diaphragm;

a second electrode secured relative to the body; and

the diaphragm being adapted to be electrostatically pulled toward the second electrode in a rolling action beginning in the first region toward a second position when a voltage is applied between the first electrode and the second electrode, the diaphragm restricting fluid from flowing between the first port and the second port in the second position.

9. An electrostatic actuated valve according to claim 8 wherein the diaphragm is elastically deformed when electrostatically pulled toward the second position, and at least substantially returns to the first position under an elastic restoring force when not electrostatically pulled toward the second position.

10. An electrostatic actuated valve according to claim 8 wherein:

the first port extends through the second opposing wall and into the chamber and the second port extends through the second opposing wall and into the chamber;

the second electrode being secured relative to the second opposing wall;

wherein the diaphragm is electrostatically pulled toward the second opposing wall when a voltage is applied between the first electrode and the second electrode, thereby restricting fluid from flowing between the first port and the second port.

11. An electrostatic actuated valve according to claim 10 wherein the diaphragm is positioned adjacent the first opposing wall in the first position.

12. An electrostatic actuated valve according to claim 11 wherein the diaphragm separates the chamber into a first region and a second region, wherein the first region is in fluid communication with the first port, and the second region is in fluid communication with the first port and the second port when the diaphragm is in the first position.

13. An electrostatic actuated valve according to claim 12 wherein the first region extends between the diaphragm and the first opposing wall, and the second region extends between the diaphragm and the second opposing wall.

14. An electrostatic actuated valve according to claim 13 further comprising a sit positioned between the diaphragm and the first opposing wall to reduce the contact surface between the diaphragm and the first opposing wall.

15. An electrostatic actuated valve comprising:

a body forming a chamber, the chamber having a first port and a second port;

a diaphragm mounted in the chamber, the diaphragm having a first position that restricts fluid from flowing between the first port and the second port, and a second position that allows fluid to flow between the first port and the second port, the diaphragm being fluid impermeable;

the first port and the second port being located on the same side of the diaphragm;

a first electrode secured relative to the diaphragm; and

a second electrode secured relative to the body;

wherein the diaphragm and electrodes are placed such that, when a voltage is applied between the first electrode and the second electrode, the diaphragm electrostatically actuates between the first position and the second position.

16. An electrostatic actuated valve for controlling fluid flow between an inlet and an outlet, the valve comprising:

a body forming a chamber having a first port, and a second port, the first port including a protruding portion thereabout;

a diaphragm mounted in the chamber, the diaphragm having a first position in which the diaphragm contacts the protruding portion and restricts fluid flow between the first port and the second port, and a second position in which the diaphragm allows fluid to flow between the first port and the second port;

a first electrode secured relative to the diaphragm; and

a second electrode secured relative to the body;

wherein the diaphragm and electrodes are placed such that, when a voltage is applied between the first electrode and the second electrode, the diaphragm electrostatically actuates between the first position and the second position.

17. An electrostatic actuated valve as in claim 16, wherein the body forming the chamber includes a first side of the chamber, the first side having a recessed portion, wherein the protruding portion extends up from the recessed portion.

18. An electrostatic actuated valve as in claim 16, wherein the body forming the chamber includes a first side of the chamber, wherein the protruding portion is formed on the first side by depositing a material on the first side.

19. An electrostatic actuated valve comprising:

a body forming a chamber, the chamber having a first port and a second port;

a diaphragm mounted in the chamber;

a first electrode secured relative to the diaphragm; and

a second electrode secured relative to the body;

wherein;

the diaphragm is adapted to assume a first position when an electrostatic force is not provided between the first electrode and the second electrode;

the diaphragm is adapted to assume a second position when an electrostatic force is provided between the first electrode and the second electrode;

the diaphragm being stretched in at least one of the first position or the second position; and

the first position and the second position are configured such that one of the positions allows fluid flow between the first port and the second port, and the other position prevents fluid flow between the first port and the second port.