Electrostatically actuated valve
First Claim
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1. An electrostatic actuated valve comprising:
- a body forming a chamber;
the chamber having a first port and a second port;
a diaphragm mounted in the chamber, said diaphragm having a first position that restricts fluid from flowing between the first port and the second port, and a second position that allows fluid to flow between the first port and the second port;
a first electrode secured relative to the diaphragm;
a second electrode secured relative to the body; and
wherein the diaphragm is electrostatically actuated between the first position and the second position when a voltage is applied between the first electrode and the second electrode; and
wherein the chamber has a first opposing wall and a second opposing wall, the first opposing wall and the second opposing wall being configured such that the spacing between the first opposing wall and the second opposing wall is smaller in a first region of the chamber than in an adjacent second region, the diaphragm being mounted between the first opposing wall and the second opposing wall such that the diaphragm is electrostatically pulled toward the second electrode in a rolling action beginning in the first region.
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Abstract
An electrostatically actuated valve that is relatively small, has relatively low fabrication costs, and consumes relatively low voltage and/or power. Normally closed, normally open, three (or more) way valves, and other configurations are contemplated. These electrostatically actuated valves are suitable for a wide variety of applications, including but not limited to, low power and wireless applications, for example.
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Citations
19 Claims
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1. An electrostatic actuated valve comprising:
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a body forming a chamber;
the chamber having a first port and a second port;
a diaphragm mounted in the chamber, said diaphragm having a first position that restricts fluid from flowing between the first port and the second port, and a second position that allows fluid to flow between the first port and the second port;
a first electrode secured relative to the diaphragm;
a second electrode secured relative to the body; and
wherein the diaphragm is electrostatically actuated between the first position and the second position when a voltage is applied between the first electrode and the second electrode; and
wherein the chamber has a first opposing wall and a second opposing wall, the first opposing wall and the second opposing wall being configured such that the spacing between the first opposing wall and the second opposing wall is smaller in a first region of the chamber than in an adjacent second region, the diaphragm being mounted between the first opposing wall and the second opposing wall such that the diaphragm is electrostatically pulled toward the second electrode in a rolling action beginning in the first region. - View Dependent Claims (2, 3, 4)
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5. An electrostatic actuated valve comprising:
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a body forming a chamber;
the chamber having a first port and a second port, and a valve member that can be actuated between a first position and a second position to selectively allow fluid communication between the first port and the second port;
the valve member being electrostatically actuated wherein;
the chamber has a first opposing wall and a second opposing wall;
the first port extends through the first opposing wall and into the chamber and the second port extends through the first opposing wall and into the chamber;
the first opposing wall and the second opposing wall being configured such that the spacing between the first opposing wall and the second opposing wall is smaller near the edge of the chamber than near the center of the chamber; and
the diaphragm is mounted between the first opposing wall and the second opposing wall such that the diaphragm is electrostatically pulled toward the second electrode in a rolling action. - View Dependent Claims (6, 7)
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8. An electrostatic actuated valve comprising:
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a body forming a chamber;
the chamber having a first opposing wall, a second opposing wall, a first port and a second port;
the first opposing wall and the second opposing wall being configured such that the spacing between the first opposing wall and the second opposing wall is smaller in a first region of the chamber than in an adjacent second region;
a diaphragm positioned between the first opposing wall and the second opposing wall and having a first position that allow fluid to flow between first port and the second port;
a first electrode secured relative to the diaphragm;
a second electrode secured relative to the body; and
the diaphragm being adapted to be electrostatically pulled toward the second electrode in a rolling action beginning in the first region toward a second position when a voltage is applied between the first electrode and the second electrode, the diaphragm restricting fluid from flowing between the first port and the second port in the second position. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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15. An electrostatic actuated valve comprising:
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a body forming a chamber, the chamber having a first port and a second port;
a diaphragm mounted in the chamber, the diaphragm having a first position that restricts fluid from flowing between the first port and the second port, and a second position that allows fluid to flow between the first port and the second port, the diaphragm being fluid impermeable;
the first port and the second port being located on the same side of the diaphragm;
a first electrode secured relative to the diaphragm; and
a second electrode secured relative to the body;
wherein the diaphragm and electrodes are placed such that, when a voltage is applied between the first electrode and the second electrode, the diaphragm electrostatically actuates between the first position and the second position.
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16. An electrostatic actuated valve for controlling fluid flow between an inlet and an outlet, the valve comprising:
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a body forming a chamber having a first port, and a second port, the first port including a protruding portion thereabout;
a diaphragm mounted in the chamber, the diaphragm having a first position in which the diaphragm contacts the protruding portion and restricts fluid flow between the first port and the second port, and a second position in which the diaphragm allows fluid to flow between the first port and the second port;
a first electrode secured relative to the diaphragm; and
a second electrode secured relative to the body;
wherein the diaphragm and electrodes are placed such that, when a voltage is applied between the first electrode and the second electrode, the diaphragm electrostatically actuates between the first position and the second position. - View Dependent Claims (17, 18)
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19. An electrostatic actuated valve comprising:
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a body forming a chamber, the chamber having a first port and a second port;
a diaphragm mounted in the chamber;
a first electrode secured relative to the diaphragm; and
a second electrode secured relative to the body;
wherein;
the diaphragm is adapted to assume a first position when an electrostatic force is not provided between the first electrode and the second electrode;
the diaphragm is adapted to assume a second position when an electrostatic force is provided between the first electrode and the second electrode;
the diaphragm being stretched in at least one of the first position or the second position; and
the first position and the second position are configured such that one of the positions allows fluid flow between the first port and the second port, and the other position prevents fluid flow between the first port and the second port.
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Specification