Electric field orientation of carbon nanotubes

• US 6,837,928 B1
• Filed: 08/30/2002
• Issued: 01/04/2005
• Est. Priority Date: 08/30/2001
• Status: Expired due to Fees

• Current Assignee: Board of Trustees of the Leland Stanford Junior University (Stanford Management Co.)
• Original Assignee: Board of Trustees of the Leland Stanford Junior University (Stanford Management Co.)
• Inventors: Zhang, Yuegang, Dai, Hongjie
• Primary Examiner(s): HITESHEW, FELISA CARLA
• Application Number:
  US10/233,058
• Time in Patent Office: 858 Days
• Field of Search: 117/84, 117/89, 117/94, 117/95
• US Class Current: 117/95
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: C30B 25/02 Epitaxial-layer growth
• CPC Class Codes: C30B 25/16 Controlling or regulating controlling or regulating in general G05
• CPC Class Codes: C30B 29/605 Products containing multiple oriented crystallites, e.g. columnar crystallites
• CPC Class Codes: Y10S 977/843 Gas phase catalytic growth, i.e. chemical vapor deposition
• CPC Class Codes: Y10S 977/942 including protein logic element

Abstract

Carbon nanotubes are implemented in a manner that facilitates their orientation and arrangement for a variety of applications. According to an example embodiment of the present invention, an electric field is used to orient carbon nanotubes along a direction of the electric field (e.g., along a direction generally parallel to an electric field applied between two electrodes). In one implementation, the electric field is used to orient a nanotube that has already been grown. In another implementation, the electric field is used in situ, with nanotubes being aligned while they are grown. With these approaches, carbon nanotubes can be selectively oriented for one or more of a variety of implementations. Furthermore, arrays of aligned carbon nanotubes can be formed extending between circuit nodes having both similar and different orientations.

Claims

1. A method for manufacturing a carbon nanotube device, the method comprising applying an electric field and aligning a carbon nanotube with the electric field.

2. The method of claim 1, wherein applying an electric field includes applying an electric field to the carbon nanotube after it is grown.

3. The method of claim 1, wherein applying an electric field includes applying an electric field while simultaneously growing the carbon nanotube.

4. The method of claim 3, wherein growing the carbon nanotube includes growing the carbon nanotube extending from a raised structure on a surface.

5. The method of claim 4, wherein growing the carbon nanotube includes growing the carbon nanotube on the surface and extending between said raised structure and a second raised structure on the surface.

6. A method for manufacturing a carbon nanotube, the method comprising:

inducing a dipole moment adapted to effect an aligning torque on a wall structure of a carbon nanotube; and

using the induced dipole moment for alignment and forming a carbon nanotube.

7. The method of claim 6, wherein forming a carbon nanotube includes forming a plurality of carbon nanotubes and wherein inducing a dipole moment includes effecting an aligning torque on each of the plurality of carbon nanotubes as they are grown, the aligning torque being sufficient to inhibit alignment randomization of the orientation of the plurality of carbon nanotubes.

8. The method of claim 7, wherein effecting an aligning torque includes effecting an aligning torque that sufficient to inhibit alignment randomization due to at least one of:

thermal fluctuations and the flow of gas near the carbon nanotube.

9. The method of claim 6, wherein the wall structure is a single wall structure and wherein inducing a dipole moment includes applying an electric field of at least about 1 volt/micron to the carbon nanotube as it is grown.

10. The method of claim 6, further comprising forming a first raised structure on a substrate surface, wherein forming a carbon nanotube includes forming a carbon nanotube from the raised structure.

11. The method of claim 10, further comprising forming a second raised structure on the substrate surface, wherein forming a carbon nanotube includes forming a carbon nanotube extending between the first and second raised structures.

12. The method of claim 11, further comprising forming a catalyst material on the first and second raised structures, prior to forming the carbon nanotube, and wherein forming the carbon nanotube includes introducing a carbon-containing gas to the first and second raised structures and reacting the carbon-containing gas to grow the carbon nanotube.

13. The method of claim 12, wherein inducing a dipole moment includes coupling first and second electrodes to the first and second raised structures and applying a voltage across the first and second electrodes.

14. The method of claim 12, wherein forming a catalyst material on the first and second raised structures comprises:

forming a first layer of material;

forming a second layer of photoresist material over the first layer, patterning the second layer using photolithography and forming openings therein that expose portions of the first layer;

etching the exposed portions of the first layer and forming wells therein;

removing the second layer of photoresist material; and

forming the catalyst material in the wells of the first layer.

15. The method of claim 14, wherein forming a first layer of material includes forming a first layer of material that is resistant to a solvent used to carry the catalyst material in suspension and wherein forming the catalyst material in the wells of the first layer includes depositing catalyst material from a methanol suspension.

16. The method of claim 11, wherein forming the carbon nanotube includes forming the carbon nanotube on the substrate surface while using the induced dipole moment for alignment of the carbon nanotube.

17. The method of claim 16, wherein forming the carbon nanotube comprises:

at a first stage of carbon nanotube growth, growing the carbon nanotube extending over the substrate surface and aligning the carbon nanotube with the induced dipole moment; and

at a second stage of carbon nanotube growth, after aligning the carbon nanotube at the first stage, allowing the carbon nanotube to fall to the substrate.

18. A method for manufacturing a carbon nanotube device, the method comprising:

forming a layer of conductive material on an insulative substrate;

etching a trench in the layer of conductive material and exposing the insulative substrate at the bottom of the trench;

forming catalyst material on portions of the layer of conductive material at opposing sides of the trench;

coupling electrical leads to the conductive material at opposite sides of the trench and applying an electric field across the trench via the electrical leads; and

using the electric field for alignment, heating the substrate while introducing molecules to the catalyst material and growing an aligned carbon nanotube extending from the catalyst material and across the trench, the carbon nanotube extending in a direction aligned with the electric field.

19. The method of claim 18, further comprising removing organic components from the layer of conductive material, prior to growing an aligned carbon nanotube.

20. The method of claim 18, wherein growing an aligned carbon nanotube includes growing an aligned carbon nanotube that electrically couples the catalyst material at opposing sides of the trench.

21. The method of claim 20, further comprising electrically coupling the carbon nanotube to an integrated circuit.

22. The method of claim 20, further comprising electrically coupling detection circuitry across the carbon nanotube, the detection circuitry being configured and arranged for detecting an electrical characteristic of the carbon nanotube.

23. The method of claim 22, wherein electrically coupling detection circuitry across the carbon nanotube includes electrically coupling circuitry configured and arranged to detect a change in an electrical characteristic of the carbon nanotube in response to the carbon nanotube being exposed to a particular molecular species and to thereby detect the presence of the particular molecular species.

24. The method of claim 18, wherein introducing molecules to the catalyst material includes flowing a gas to the catalyst material, further comprising orienting the insulative substrate so that the trench is perpendicular to the gas flow, prior to growing an aligned carbon nanotube.

25. A method for manufacturing a carbon nanotube, the method comprising:

providing a polysilicon film structure on an insulative substrate, the polysilicon film structure having parallel trenches separated by polysilicon lines and having polysilicon pads on opposite sides of the parallel trenches;

forming a liquid-phase catalyst precursor film on an upper surface of the polysilicon film;

calcining the polysilicon film structure and removing organic components therefrom;

placing the substrate on an insulating structure in a chemical vapor deposition (CVD) chamber;

electrically coupling the polysilicon pads to metal leads and applying a voltage to the pads to establish an electric field across the trenches, the electric field being adapted to align carbon nanotubes as they are being formed; and

heating the chamber, introducing a gas comprising methane and hydrogen to the polysilicon structure and forming carbon nanotubes extending between the upper surfaces of the polysilicon separated by the trenches, the carbon nanotubes being suspended over the trenches and aligned with the electric field.

26. The method of claim 25, wherein forming carbon nanotubes includes forming single-walleded carbon nanotubes.

27. The method of claim 25, wherein forming the liquid-phase catalyst precursor film includes contact printing the catalyst precursor film.

28. The method of claim 25, wherein calcining the polysilicon film includes forming mesoporous alumina frames on the polysilicon, wherein nanoparticles of the catalyst are supported on the mesoporous alumina frames.

29. The method of claim 25, wherein applying a voltage to the pads includes applying a voltage adapted to establish an electric field of at least about 1 volt/micron across the trenches.

30. The method of claim 25, wherein heating the chamber and introducing a gas comprising methane and hydrogen includes heating the chamber to about 900 degrees Celsius and introducing methane at a flowrate of about 500 sccm and hydrogen at a flowrate of about 200 sccm for about 4 minutes.

31. A method for manufacturing a carbon nanotube device, the method comprising:

forming an insulative substrate on a wafer;

forming metal electrodes on the insulative substrate;

forming catalyst material on the metal electrodes; and

simultaneously applying an electric field to the device while growing an aligned carbon nanotube extending between the metal electrodes, wherein forming an insulative substrate on a wafer and applying an electric field to the device includes forming the insulative substrate and applying the electric field in a manner that inhibits van der Waals binding of the aligned carbon nanotube during nanotube growth while achieving orientation of the nanotube with the electric field.