Integrated platen assembly for a chemical mechanical planarization system

• US 6,837,964 B2
• Filed: 11/12/2002
• Issued: 01/04/2005
• Est. Priority Date: 08/16/2001
• Status: Expired due to Term

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Marohl, Dan A., Franklin, Timothy J.
• Primary Examiner(s): Hassanzadal, P.
• Assistant Examiner(s): MACARTHUR, SYLVIA
• Application Number:
  US10/293,542
• Publication Number:
  US 20030066604A1
• Time in Patent Office: 784 Days
• Field of Search: 156/345.2, 156/345.13
• US Class Current: 156/345.2
• CPC Class Codes: B24B 21/04 for grinding plane surfaces
• CPC Class Codes: B24B 21/20 for controlling or adjusting the tracking or the tension of the grinding belt
• CPC Class Codes: B24B 37/16 characterised by the shape of the lapping plate surface, e.g. grooved
• CPC Class Codes: B24B 9/10 of plate glass

Abstract

A method and apparatus for supporting a web of polishing material are generally provided. In one embodiment, an apparatus for supporting a web of polishing material includes a web of polishing media having a first portion disposed across a support surface of a platen assembly and a second portion wound on a first roll coupled to the platen assembly. A tensioning mechanism is coupled to the platen assembly and adapted to tension the web of polishing media in response to a diameter of the second portion of the web of polishing material wound on the first roll.

Claims

1. An apparatus for supporting a web of polishing material, comprising:

a platen assembly having a support surface;

a web of polishing material having a first portion disposed across the support surface and a second portion wound on a first roll coupled to the platen assembly;

a platen port disposed in the platen assembly and fluidly coupled to the support surface;

a venturi having a vacuum port fluidly coupled to the platen port, a pressure supply port and an exit port, wherein fluid flowing between the pressure supply port and the exit port pulls fluid through the vacuum port;

a valve fluidly coupled to the exit port, the valve having a first state that causes vacuum to be drawn through the vacuum port and a second state that causes flow from the vacuum port through the platen port; and

a tensioning mechanism coupled to the platen assembly and adapted to tension the web of polishing material in response to a diameter of the second portion of the web of polishing material wound on the first roll.

2. The apparatus of claim 1, wherein the tensioning mechanism further comprises a sensor coupled to the platen assembly and adapted to provide a metric indicative of the diameter of the second portion of polishing material.

3. The apparatus of claim 1 further comprising:

a torque sensor adapted to provide a metric indicative of a torque applied to the first roll.

4. The apparatus of claim 3 further comprising:

a second roll coupled to the platen assembly opposite the first roll; and

a brake adapted to control a rotation of the second roll.

5. The apparatus of claim 4 further comprising:

a first motor coupled to the first roll; and

a second motor coupled to the second roll.

6. The apparatus of claim 1, wherein the platen assembly further comprises:

a platen;

a removable top plate disposed on the platen and having at least one vacuum port defined therein; and

a gasket fixed to the top plate and circumscribing the vacuum port, the gasket bounding an evacuatable region defined between the top plate and the web of polishing material.

7. The apparatus of claim 6, wherein the gasket is vulcanized to the top plate.

8. The apparatus of claim 1, further comprising:

a first motor coupled to a first side of the platen assembly and adapted to drive the first roll;

a second motor coupled to a second side of the platen assembly and adapted to drive a second roll having a third portion of the web wound thereon; and

wherein the tensioning mechanism comprises;

a torque sensor coupled to at least one of the first or second motor; and

a first sensor coupled to the platen assembly and adapted to provide a metric indicative of a diameter of the first or second roll having the torque sensor coupled thereto.

9. The apparatus of claim 8, wherein the platen assembly further comprises:

a brake adapted to control rotation of the second motor.

10. The apparatus of claim 8, wherein the first motor and the first roll are coupled by a timing belt.

11. The apparatus of claim 8 further comprising a second sensor adapted to detect an amount of linear displacement of the web of polishing material across the support surface of the platen assembly.

12. The apparatus of claim 8, wherein the platen assembly further comprises:

a gasket fixed to the support surface of the platen assembly for sealing against the web of polishing material.

13. The apparatus of claim 12, wherein the platen assembly further comprises:

a platen; and

a removable top plate disposed on the platen and having at least one vacuum port defined therein;

the vacuum port adapted to evacuate a region defined between the top plate and the web of polishing material and circumscribed by the gasket.

14. The apparatus of claim 13, wherein the top plate further comprises:

a plurality of channels formed in a surface of the top plate facing the web of polishing material, wherein at least one of the channels is coupled to the vacuum port.

15. The apparatus of claim 14, wherein at least one of the plurality of channels is disposed concentrically inward of the gasket.

16. The apparatus of claim 12, wherein the gasket is vulcanized to an upper surface of the platen assembly.

17. The apparatus of claim 12, wherein the gasket is fabricated from at least one of a fluoropolymer, EDPM, EPR or VITON®

.

18. An apparatus for supporting a web of polishing material, comprising:

a platen assembly having a support surface;

a web of polishing material having a first portion disposed across the support surface and a second portion wound on a first roll coupled to the platen assembly; and

a tensioning mechanism coupled to the platen assembly and adapted to tension the web of polishing material in response to a diameter of the second portion of the web of polishing material wound on the first roll, wherein the platen assembly further comprises;

a platen;

a removable top plate disposed on the platen and having at least one vacuum port defined therein; and

a gasket fixed to the top plate and circumscribing the vacuum port, the gasket bounding an evacuatable region defined between the top plate and the web of polishing material.

19. The apparatus of claim 18, wherein the gasket is vulcanized to the top plate.

20. An apparatus for supporting a web of polishing material, comprising:

a platen assembly having a support surface;

a web of polishing material having a first portion disposed across the support surface and a second portion wound on a first roll coupled to the platen assembly; and

a tensioning mechanism coupled to the platen assembly and adapted to tension the web of polishing material in response to a diameter of the second portion of the web of polishing material wound on the first roll, wherein the platen assembly further comprises;

a platen; and

a removable top plate disposed on the platen and having at least one vacuum port defined therein;

the vacuum port adapted to evacuate a region defined between the top plate and the web of polishing material and circumscribed by the gasket.

21. The apparatus of claim 20, wherein the top plate further comprises:

a plurality of channels formed a surface of the top plate facing the web of polishing material, wherein at least one of the channels coupled to the vacuum port.

22. The apparatus of claim 20, wherein at least one of the plurality of channels is disposed concentrically inward of the gasket.