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Flow cell humidity sensor system

  • US 6,838,888 B2
  • Filed: 12/13/2001
  • Issued: 01/04/2005
  • Est. Priority Date: 12/13/2001
  • Status: Expired due to Fees
First Claim
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1. An array production system comprising:

  • an array synthesis environment including fluid for forming features on a substrate, and a capacitance measurement system comprising, a body defining a chamber having first and second ports, said chamber containing a capacitance sensor probe, first and second valves, said first valve in communication with said first port and said second valve in communication with said second port, and a dry gas source, wherein a sampling conduit provides fluid communication through said first port between said chamber and said synthesis environment, and wherein said valves are positioned to allow dry gas to flow through said chamber in one state to dehydrate said senor, and a gaseous sample from said synthesis environment to flow through said chamber in a another state.

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