Probe card assembly
First Claim
1. A probe card assembly, comprising:
- a probe card having a plurality of first contact terminals;
at least one silicon substrate having a first plurality of substrate terminals and a second plurality of substrate terminals, there being a space between said probe card and said at least one silicon substrate;
a plurality of electrical connections connecting selected ones of the plurality of first contact terminals and selected ones of the plurality of first substrate terminals;
a plurality of probe elements mounted to the second plurality of substrate terminals; and
a moveable element, wherein movement of said element controls an orientation of said silicon substrate with respect to said probe card.
1 Assignment
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Accused Products
Abstract
In a probe card assembly, a series of probe elements can be arrayed on a silicon space transformer. The silicon space transformer can be fabricated with an array of primary contacts in a very tight pitch, comparable to the pitch of a semiconductor device. One preferred primary contact is a resilient spring contact. Conductive elements in the space transformer are routed to second contacts at a more relaxed pitch. In one preferred embodiment, the second contacts are suitable for directly attaching a ribbon cable, which in turn can be connected to provide selective connection to each primary contact. The silicon space transformer is mounted in a fixture that provides for resilient connection to a wafer or device to be tested. This fixture can be adjusted to planarize the primary contacts with the plane of a support probe card board.
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Citations
19 Claims
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1. A probe card assembly, comprising:
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a probe card having a plurality of first contact terminals;
at least one silicon substrate having a first plurality of substrate terminals and a second plurality of substrate terminals, there being a space between said probe card and said at least one silicon substrate;
a plurality of electrical connections connecting selected ones of the plurality of first contact terminals and selected ones of the plurality of first substrate terminals;
a plurality of probe elements mounted to the second plurality of substrate terminals; and
a moveable element, wherein movement of said element controls an orientation of said silicon substrate with respect to said probe card. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A probe card assembly, comprising:
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a probe card having a plurality of first contact terminals;
at least one silicon substrate having a first plurality of substrate terminals and a second plurality of substrate terminals;
a plurality of electrical connections connecting selected ones of the plurality of first contact terminals and selected ones of the plurality of first substrate terminals;
a plurality of probe elements mounted to the second plurality of substrate terminals; and
a compliant element for biasing the at least one silicon substrate away from the probe card, wherein the compliant element is at least one coil spring.
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17. A probe card assembly, comprising:
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a probe card having a plurality of first contact terminals;
at least one silicon substrate having a first plurality of substrate terminals and a second plurality of substrate terminals, there being a space between said probe card and said at least one silicon substrate;
a plurality of tape automated bonds connecting selected ones of the plurality of first contact terminals with selected ones of the plurality of first substrate terminals;
a plurality of probe elements mounted to the second plurality of substrate terminals;
a compliant element for biasing the at least one silicon substrate away from the probe card; and
a moveable element, wherein movement of said element controls an orientation of said silicon substrate with respect to said probe card. - View Dependent Claims (18)
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19. A probe card assembly comprising:
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a probe card;
at least one silicon substrate, there being a space between said silicon substrate and said probe card;
a compliant element electrically connecting said at least one silicon substrate with said probe card;
a plurality of probe elements disposed on said silicon substrate; and
a moveable element, wherein movement of said element controls an orientation of said silicon substrate with respect to said probe card.
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Specification