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Probe card assembly

  • US 6,838,893 B2
  • Filed: 06/10/2003
  • Issued: 01/04/2005
  • Est. Priority Date: 11/16/1993
  • Status: Expired due to Fees
First Claim
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1. A probe card assembly, comprising:

  • a probe card having a plurality of first contact terminals;

    at least one silicon substrate having a first plurality of substrate terminals and a second plurality of substrate terminals, there being a space between said probe card and said at least one silicon substrate;

    a plurality of electrical connections connecting selected ones of the plurality of first contact terminals and selected ones of the plurality of first substrate terminals;

    a plurality of probe elements mounted to the second plurality of substrate terminals; and

    a moveable element, wherein movement of said element controls an orientation of said silicon substrate with respect to said probe card.

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