System and software for database structure in semiconductor manufacturing and method thereof

• US 6,839,713 B1
• Filed: 07/12/2001
• Issued: 01/04/2005
• Est. Priority Date: 07/12/2001
• Status: Expired due to Fees

• Current Assignee: Advanced Micro Devices, Inc.
• Original Assignee: Advanced Micro Devices, Inc.
• Inventors: Patty, Richard Bruce, Brown, Russell Clinton, Shi, Yurong
• Primary Examiner(s): Corrielus, Jean M.
• Application Number:
  US09/905,213
• Time in Patent Office: 1,272 Days
• Field of Search: 707/101, 707/104, 707/3, 707/1, 707/100, 356/626, 356/446, 438/747, 438/8, 438/7, 438/6, 261/85
• US Class Current: 1/1
• CPC Class Codes: G06Q 10/06 Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling
• CPC Class Codes: G11C 2029/0403 during or with feedback to manufacture
• CPC Class Codes: Y10S 707/99933 Query processing, i.e. searching
• CPC Class Codes: Y10S 707/99942 Manipulating data structure, e.g. compression, compaction, compilation
• CPC Class Codes: Y10S 707/99945 Object-oriented database structure processing

Abstract

The functionality of various process control and data collection system embodiments may be improved by employing the database methodology disclosed herein during the requirements-analysis phase for data collection and process control in a semiconductor manufacturing environment. The relational database storage technology as disclosed herein consists of a set of interconnected tables, where each table has a field or an amalgamation of fields (primary key) that uniquely identifies each record (tuple) in the table. In addition, the method as disclosed herein utilizes foreign keys, which represent the value of a primary key for a related table. Aggregation levels are also employed in the method as disclosed herein to associate data from various production

Claims

1. A method comprising the steps of:

storing information representing a first semiconductor process measurement in a first table of a relational database, the first semiconductor process measurement associated with a first unit having a first aggregation level; and

storing information representing a second semiconductor process measurement in the first table, the second semiconductor process measurement associated with a second unit having a second aggregation level different from the first aggregation level.

2. The method as in claim 1, wherein the first aggregation level and the second aggregation level are selected from a group consisting of:

batches, lots, wafers, entity, processing area, die, site, or coordinate.

3. The method as in claim 1, wherein:

the information representing a first semiconductor process measurement includes a first attribute associated with the first semiconductor process measurement; and

the information representing a second semiconductor measurement includes a second attribute associated with the second semiconductor process measurement.

4. The method as in claim 1, wherein one of the first semiconductor process measurement and the second semiconductor process measurements is a die-level measurement.

5. The method as in claim 1, wherein one of the first semiconductor process measurement and the second semiconductor process measurements is a wafer-level measurement.

6. The method as in claim 1, wherein one of the first semiconductor process measurement and the second semiconductor process measurement are selected from a group consisting of:

coordinate-level, lot-level, die-level, entity level, site level, or wafer-level.

7. The method as in claim 1, wherein one of the first semiconductor process measurement and the second semiconductor process measurements is a calculated result based on a plurality of measurements.

8. The method as in claim 1, further including the steps of:

associating the first table with a second table of the relational database;

storing, in the second table, information characterizing the first unit; and

storing, in the second table, information characterizing the second unit.

9. The method as in claim 8, wherein:

the information characterizing the first unit includes information specifying the first aggregation level; and

the information characterizing the second unit includes information specifying the aggregation level.

10. The method as in claim 8, further including the steps of:

associating the second table with a third table of the relational database;

storing, in the third table, information characterizing a first product run associated with the first unit; and

storing, in the third table, information characterizing a second product run associated with the second unit.

11. A system comprising:

a processor;

memory operably associated with said processor;

a program of instructions to be stored in said memory and executed by said processor,

said program of instructions including instructions to;

store information representing a first semiconductor process measurement in a first table of a relational database, the first semiconductor process measurement associated with a first unit having a first aggregation level; and

store information representing a second semiconductor process measurement in the first table, the second semiconductor process measurement associated with a second unit having a second aggregation level different from the first aggregation level.

12. The system as in claim 11, wherein the first aggregation level and the second aggregation level are selected from a group consisting of:

batches, lots, wafers, entity, processing area, die, site, or coordinate.

13. The system as in claim 11, wherein:

the information representing a first semiconductor process measurement includes a first attribute associated with the first semiconductor process measurement; and

the information representing a second semiconductor measurement includes a second attribute associated with the second semiconductor process measurement.

14. The system as in claim 11, wherein one of the first semiconductor process measurement and the second semiconductor process measurements is a die-level measurement.

15. The system as in claim 11, wherein one of the first semiconductor process measurement and the second semiconductor process measurements is a wafer-level measurement.

16. The system as in claim 11, wherein one of the first semiconductor process measurement and the second semiconductor process measurements is a coordinate-level measurement.

17. The system as in claim 11, wherein one of the first semiconductor process measurement and the second semiconductor process measurements is an entity-level measurement.

18. The system as in claim 11, wherein one of the first semiconductor process measurement and the second semiconductor process measurements is a batch-level measurement.

19. The system as in claim 11, wherein one of the first semiconductor process measurement and the second semiconductor process measurements is A lot-level measurement.

20. The system as in claim 11, wherein one of the first semiconductor process measurement and the second semiconductor process measurements is a site-level measurement.

21. The system as in claim 11, wherein one of the first semiconductor process measurement and the second semiconductor process measurements is a calculated result based on a plurality of measurements.

22. The system as in claim 11, said program of instructions further including instructions to:

associate the first table with a second table of the relational database;

store, in the second table, information characterizing the first unit; and

store, in the second table, information characterizing the second unit.

23. The system as in claim 22, wherein:

the information characterizing the first unit includes information specifying the first aggregation level; and

the information characterizing the second unit includes information specifying the aggregation level.

24. The system as in claim 22, said program of instructions further including instructions to:

associate the second table with a third table of the relational database;

store, in the third table, information characterizing a first product run associated with the first unit; and

store, in the third table, information characterizing a second product run associated with the second unit.

25. A computer readable medium tangibly embodying a program of instructions, said program of instructions including instructions to:

store information representing a first semiconductor process measurement in a first table of a relational database, the first semiconductor process measurement associated with a first unit having a first aggregation level; and

store information representing a second semiconductor process measurement in the first table, the second semiconductor process measurement associated with a second unit having a second aggregation level different from the first aggregation level.

26. The computer readable medium as in claim 25, wherein the first aggregation level and the second aggregation level are selected from a group consisting of:

batches, lots, wafers, entity, processing area, die, site, or coordinate.

27. The computer readable medium as in claim 25, wherein:

the information representing a first semiconductor process measurement includes a first attribute associated with the first semiconductor process measurement; and

the information representing a second semiconductor measurement includes a second attribute associated with the second semiconductor process measurement.

28. The computer readable medium as in claim 25, wherein one of the first semiconductor process measurement and the second semiconductor process measurements is a die-level measurement.

29. The computer readable medium as in claim 25, wherein one of the first semiconductor process measurement and the second semiconductor process measurements is a wafer-level measurement.

30. The computer readable medium as in claim 25, wherein one of the first semiconductor process measurement and the second semiconductor process measurements are selected from a group consisting of entity, processing area, coordinate, or site.

31. The computer readable medium as in claim 25, wherein one of the first semiconductor process measurement and the second semiconductor process measurements is a calculated result based on a plurality of measurements.

32. The computer readable medium as in claim 25, said program of instructions further including instructions to:

associate the first table with a second table of the relational database;

store, in the second table, information characterizing the first unit; and

store, in the second table, information characterizing the second unit.

33. The computer readable medium as in claim 32, wherein:

the information characterizing the first unit includes information specifying the first aggregation level; and

the information characterizing the second unit includes information specifying the aggregation level.

34. The computer readable medium as in claim 32, said program of instructions further including instructions to:

associate the second table with a third table of the relational database;

store, in the third table, information characterizing a first product run associated with the first unit; and

store, in the third table, information characterizing a second product run associated with the second unit.

35. A method comprising the steps of:

storing, in a first table of a relational database, a first primary key identifying a semiconductor production run;

storing, in a second table of a relational database, a second primary key identifying a production unit;

storing, in the second table, a first foreign key to associate the production unit with the semiconductor production run;

storing, in the second table, information identifying an aggregation level of the production unit;

storing, in a third table of the relational database, process measurement information;

storing, in the third table, a third primary key identifying a production unit reading;

storing, in the third table, the first foreign key to associate process measurement information with the semiconductor production run; and

storing, in the third table, the second foreign key to associate the process measurement information with the production unit.

36. The method as in claim 35, wherein the aggregation level of the production unit is selected from a group consisting of:

batches, lots, wafers, entity, processing area, die, site, or coordinate.

37. The method as in claim 35, wherein the process measurement information includes a die-level measurement.

38. The method as in claim 35, wherein the process measurement information includes a wafer-level measurement.

39. The method as in claim 35, wherein the process measurement information includes a coordinate-level measurement.

40. The method as in claim 35, wherein the process measurement information includes a calculated result based on a plurality of measurements.

41. The method as in claim 35, wherein the process measurement information includes an entity-level measurement.

42. The method as in claim 35, wherein the process measurement information includes a batch-level measurement.

43. The method as in claim 35, wherein the process measurement information includes a lot-level measurement.

44. The method as in claim 35, wherein the process measurement information includes a site-level measurement.