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System and software for database structure in semiconductor manufacturing and method thereof

  • US 6,839,713 B1
  • Filed: 07/12/2001
  • Issued: 01/04/2005
  • Est. Priority Date: 07/12/2001
  • Status: Expired due to Fees
First Claim
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1. A method comprising the steps of:

  • storing information representing a first semiconductor process measurement in a first table of a relational database, the first semiconductor process measurement associated with a first unit having a first aggregation level; and

    storing information representing a second semiconductor process measurement in the first table, the second semiconductor process measurement associated with a second unit having a second aggregation level different from the first aggregation level.

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