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Sensor using an actuator for self-test and method therefor

  • US 6,840,106 B1
  • Filed: 08/14/2003
  • Issued: 01/11/2005
  • Est. Priority Date: 08/14/2003
  • Status: Expired due to Term
First Claim
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1. A sensing structure comprising:

  • a substrate;

    a movable mass positioned over the substrate and movable laterally with respect to the substrate;

    a first sensing electrode fixably coupled to the substrate and positioned adjacent to a first portion of the movable mass to form a first capacitive structure for sensing a change in location of the movable mass along a first axis of lateral movement of the movable mass;

    a second sensing electrode fixably coupled to the substrate and positioned adjacent to a second portion of the movable mass to form a second capacitive structure for sensing a change in location of the movable mass along a second axis of lateral movement of the movable mass, the second axis is generally orthogonal to the first axis;

    an actuating electrode fixably coupled to the substrate and positioned adjacent to a third portion of the movable mass, wherein a voltage differential between the actuating electrode and the third portion provides a force for lateral movement of the movable mass in a diagonal direction, the diagonal direction being at a first angle with respect to the first axis and at a second angle with respect to the second axis.

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