Sensor using an actuator for self-test and method therefor

• US 6,840,106 B1
• Filed: 08/14/2003
• Issued: 01/11/2005
• Est. Priority Date: 08/14/2003
• Status: Expired due to Term

• Current Assignee: North Star Innovations Inc. (Wi-LAN Inc.)
• Original Assignee: Freescale Semiconductor, Inc. (NXP Semiconductors NV)
• Inventors: McNeil, Andrew C.
• Primary Examiner(s): Kwok, Helen C.
• Application Number:
  US10/640,724
• Time in Patent Office: 516 Days
• Field of Search: 735/143.2, 73/13.7, 73/13.8, 735/143.6, 735/143.8, 738/626.26, 735/141.6, 735/141.8, 738/626.8, 735/041.4, 361/280, 361/283.3, 361/283.1
• US Class Current: 73/514.32
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 15/18 in two or more dimensions
• CPC Class Codes: G01P 2015/082 for two degrees of freedom of movement of a single mass

Abstract

A self-test structure is placed in the middle of a sensing structure that utilizes a movable mass. The sensing structure has portions aligned in two directions that are orthogonal to each other. The self-test structure is an actuator made up of individual sensing patterns. The individual sensing patterns are aligned along a line that is diagonal to the two directions, thereby reducing the number of individual sensing patterns required for the actuator that is used for self-test. The reduced number of sensing patterns results in more mass for the movable mass, thereby improving sensitivity of the sensing structure.

Claims

1. A sensing structure comprising:

a substrate;

a movable mass positioned over the substrate and movable laterally with respect to the substrate;

a first sensing electrode fixably coupled to the substrate and positioned adjacent to a first portion of the movable mass to form a first capacitive structure for sensing a change in location of the movable mass along a first axis of lateral movement of the movable mass;

a second sensing electrode fixably coupled to the substrate and positioned adjacent to a second portion of the movable mass to form a second capacitive structure for sensing a change in location of the movable mass along a second axis of lateral movement of the movable mass, the second axis is generally orthogonal to the first axis;

an actuating electrode fixably coupled to the substrate and positioned adjacent to a third portion of the movable mass, wherein a voltage differential between the actuating electrode and the third portion provides a force for lateral movement of the movable mass in a diagonal direction, the diagonal direction being at a first angle with respect to the first axis and at a second angle with respect to the second axis.

2. The sensing structure of claim 1 further comprising:

a third sensing electrode fixably coupled to the substrate and positioned adjacent to the first portion of the movable mass on an opposing side of the first portion to form a first differential capacitor with the first sensing electrode for sensing the location of the movable mass along the first axis, wherein the first differential capacitor includes the first capacitive structure;

a fourth sensing electrode fixably coupled to the substrate and positioned adjacent to the second portion of the movable mass on an opposing side of the second portion to form a second differential capacitor with the second sensing electrode for sensing a change in location of the movable mass along the second axis, wherein the second differential capacitor includes the second capacitive structure.

3. The sensing structure of claim 1 wherein the actuating electrode includes a side that is orthogonal to the diagonal direction.

4. The sensing structure of claim 3 wherein the movable mass comprises silicon.

5. The sensing structure of claim 3 wherein the side of the third portion of the movable mass is parallel to the side of the actuating electrode.

6. The sensing structure of claim 1 wherein the first angle is generally 45 degrees and the second angle is generally 45 degrees.

7. The sensing structure of claim 1 wherein the third portion of the movable mass is an extension.

8. The sensing structure of claim 1 wherein the movable mass is made or polysilicon.

9. The sensing structure of claim 1 wherein the movable mass includes an opening, wherein a side of the third portion of the movable mass that faces a side of the actuating electrode is a side of the opening.

10. The sensing structure of claim 9 wherein at least a portion of the actuating electrode is located in the opening.

11. The sensing structure of claim 10 further comprising:

a shielding electrode, at least a portion of the shielding electrode located in the opening between a second side of the opening and the actuating electrode, the second side of the opening being an opposing side of the side of the opening.

12. An accelerometer including the sensing structure of claim 1.

13. A method for moving and sensing a change in location of a movable mass of a sensing structure, the method comprising:

applying a force on the movable mass to laterally move a the movable mass in a lateral direction to a first location, the lateral direction being at a first angle with respect to a first axis of lateral movement of the movable mass and being at a second angle with respect to a second axis of lateral movement of the movable mass;

sensing a change in location of the movable mass along the first axis with the movable mass at the first location after the applying;

sensing a change in location of the movable mass along the second axis with the movable mass at the first location after the applying.

14. The method of claim 13 further comprising:

removing the force after the sensing the change in location along the first axis and the sensing the change in location along the second axis.

15. The method of claim 13 wherein the applying the force further comprises:

applying a first voltage differential between the movable mass and at least one fixed electrode adjacent to the movable mass.

16. The method of claim 15 wherein each fixed electrode of the at least one fixed electrode includes a first side facing a first side of a portion of the movable mass, wherein the first side of each fixed electrode of the at least one fixed electrode is oriented generally orthogonal with respect to the lateral direction.

17. The method of claim 15 wherein each fixed electrode of the at least one fixed electrode includes a first side facing a first side of a portion of the movable mass that is generally orthogonal with respect to the lateral direction.

18. The method of claim 13 wherein the sensing structure is pat of an accelerometer.

19. The method of claim 13 wherein the sensing along the first axis includes measuring current flowing through at least one capacitor of a plurality of capacitors, wherein each capacitor of the plurality of capacitors includes a portion of the movable mass.

20. The method of claim 19 wherein the sensor structure includes at least one differential capacitor having a first capacitor and a second capacitor, wherein for each differential capacitor of the at least one differential capacitor, a portion of the movable mass is an electrode for the first capacitor and the second capacitor, wherein the sensing along the first axis includes measuring the current flowing through the first capacitor of the at least one differential capacitor and measuring the current flowing through the second capacitor of the at least one differential capacitor.

21. A sensing structure comprising:

a movable mass positioned over a substrate and movable laterally with respect to the substrate;

a first sensing circuit including at least a portion of the movable mass, the first sensing circuit for sensing a change in location of the movable mass along a first axis of lateral movement of the movable mass;

a second sensing circuit including at least a portion of the movable mass, the second sensing circuit for sensing a change in location of the movable mass along a second axis of lateral movement of the movable mass, the first axis being generally orthogonal to the second axis;

an actuator circuit including at least one electrode fixedly coupled to the substrate and adjacent to a portion of the movable mass, wherein a voltage differential between the at least one electrode and the movable mass provides for a movement of the movable mass in a lateral direction with respect to the at least one electrode, the lateral direction being at a first angle with respect to the first axis and being at a second angle with respect to the second axis.

22. The sensing structure of claim 21 wherein the first angle is generally 45 degrees and the second angle is generally 45 degrees.

23. The sensing structure of claim 21 wherein:

the first sensing circuit includes at least one capacitor, wherein each capacitor of the at least one capacitor of the first sensing circuit includes a portion of the movable mass as an electrode;

the second sensing circuit includes at least one capacitor, wherein each capacitor of the at least one capacitor of the second circuit includes a portion of the movable mass as an electrode.

24. The sensing structure of claim 21 wherein:

the first sensing circuit includes at least one differential capacitor, wherein each differential capacitor of the first sensing circuit of the at least one differential capacitor includes a portion of the movable mass as an electrode;

the second sensing circuit includes at least one differential capacitor, wherein each differential capacitor of the at least one differential capacitor of the second sensing circuit includes a portion of the movable mass as an electrode.

25. An accelerometer including the sensing structure of claim 21.

26. The sensing structure of claim 21 wherein each electrode of the at least one electrode includes a side facing a side of a portion of the movable mass, wherein the side of each electrode is oriented generally orthogonal with respect to the lateral direction.

27. The sensing structure of claim 21 wherein the movable mass includes at least one opening, wherein each electrode of the at least one electrode includes at least a portion located in an opening of the at least one opening.

28. The sensing structure of claim 27 wherein each opening of the at least one opening has a generally rectangular form having sides that are oriented at angles with respect to the first as and with respect to the second axis.

29. The sensing structure of claim 21 wherein each electrode of the at least one electrode is oriented at a third angle with respect to the first axis and at a fourth angle with respect to the second axis.