Solvated ruthenium precursors for direct liquid injection of ruthenium and ruthenium oxide
First Claim
1. A solvated ruthenium precursor formulation comprising:
- a tricarbonyl ruthenium compound containing an oxidizing agent; and
a solvent capable of solubilizing said tricarbonyl ruthenium compound.
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Abstract
A method is provided for forming a film of ruthenium or ruthenium oxide to the surface of a substrate by employing the techniques of chemical vapor deposition to decompose ruthenium precursor formulations. The ruthenium precursor formulations of the present invention include a ruthenium precursor compound and a solvent capable of solubilizing the ruthenium precursor compound. A method is further provided for making a vaporized ruthenium precursor for use in the chemical vapor deposition of ruthenium and ruthenium-containing materials onto substrates, wherein a ruthenium precursor formulation having a ruthenium-containing precursor compound and a solvent capable of solubilizing the ruthenium-containing precursor compound is vaporized.
28 Citations
20 Claims
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1. A solvated ruthenium precursor formulation comprising:
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a tricarbonyl ruthenium compound containing an oxidizing agent; and
a solvent capable of solubilizing said tricarbonyl ruthenium compound. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A solvated ruthenium precursor formulation comprising:
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an oxidized ruthenium compound; and
a solvent selected from the group consisting of hexane, pentane, heptane, and butylacetate. - View Dependent Claims (10, 11, 12)
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13. A solvated ruthenium precursor formulation comprising:
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cyclohexadienetricarbonyl ruthenium;
a solvent selected from the group consisting of hexane, pentane, heptane, and butylacetate; and
an oxidizing agent. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20)
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Specification