Method of reducing in-trench smearing during polishing
First Claim
1. A method of polishing a substrate comprising the following sequential steps:
- (a) providing a substrate comprising (i) a first layer comprising an insulating material, (ii) a second layer comprising a filling material that differs from the insulating material, and (iii) a plurality of field and trench regions;
(b) infiltrating a polymeric material over the substrate, wherein the polymeric material fills the trench regions and covers the field regions;
(c) removing the polymeric material from the field regions to expose the filling material in the field regions;
(d) subjecting the substrate to a temperature of about 100°
C. or more for about 30 minutes or longer to bake the substrate, such that the polymeric material in the trench regions becomes recessed below the insulating material of the field regions (e) depositing a layer of additional material with a higher modulus than the polymeric material over the polymeric material in the trench regions and the filling material in the field regions; and
(f) polishing or etching the substrate to remove the additional material and filling material from the field regions of the substrate and to make the additional material in the trench regions substantially planar with or recessed below the insulating material of the field regions.
3 Assignments
0 Petitions
Accused Products
Abstract
The invention provides a method of reducing in-trench smearing during polishing. The method comprises providing a substrate comprising a first layer comprising an insulating material, a second layer comprising a filling material, and a plurality of field and trench regions. A polymeric material is infiltrated over the substrate, wherein the polymeric material fills the trench regions and covers the field regions. The polymeric material optionally is removed from the field regions, followed by baking of the substrate such that the polymeric material in the trench regions becomes recessed below the insulating material of the field regions. The substrate is then subjected to a temperature of about 100° C. or more for about 30 minutes or longer, such that during polishing of the substrate, smearing of the filling material in the trench regions is reduced as compared to polishing of the substrate under the same conditions except for subjecting the substrate to the temperature of about 100° C. or more for about 30 minutes or longer. When desirable, a layer of additional material can be deposited over the polymeric material such that it forms a layer over the polymeric material in the trench regions and the filling material in the field regions. The substrate is then polished to obtain a substantially planar surface.
-
Citations
17 Claims
-
1. A method of polishing a substrate comprising the following sequential steps:
-
(a) providing a substrate comprising (i) a first layer comprising an insulating material, (ii) a second layer comprising a filling material that differs from the insulating material, and (iii) a plurality of field and trench regions;
(b) infiltrating a polymeric material over the substrate, wherein the polymeric material fills the trench regions and covers the field regions;
(c) removing the polymeric material from the field regions to expose the filling material in the field regions;
(d) subjecting the substrate to a temperature of about 100°
C. or more for about 30 minutes or longer to bake the substrate, such that the polymeric material in the trench regions becomes recessed below the insulating material of the field regions(e) depositing a layer of additional material with a higher modulus than the polymeric material over the polymeric material in the trench regions and the filling material in the field regions; and
(f) polishing or etching the substrate to remove the additional material and filling material from the field regions of the substrate and to make the additional material in the trench regions substantially planar with or recessed below the insulating material of the field regions. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
-
Specification