Semiconductor device formed over a surface with a drepession portion and a projection portion
First Claim
1. A semiconductor device comprising:
- an insulating film having a rectangular or stripe pattern depression portion and projection portion; and
a thin film transistor having a channel formation region that is placed only between a center and an edge of the depression portion of the insulating film, wherein the channel formation region extends along a longitudinal direction of the rectangular or stripe pattern depression portion and projection portion.
1 Assignment
0 Petitions
Accused Products
Abstract
A semiconductor device production system using a laser crystallization method is provided which can avoid forming grain boundaries in a channel formation region of a TFT, thereby preventing grain boundaries from lowering the mobility of the TFT greatly, from lowering ON current, and from increasing OFF current. Rectangular or stripe pattern depression and projection portions are formed on an insulating film. A semiconductor film is formed on the insulating film. The semiconductor film is irradiated with continuous wave laser light by running the laser light along the stripe pattern depression and projection portions of the insulating film or along the major or minor axis direction of the rectangle. Although continuous wave laser light is most preferred among laser light, it is also possible to use pulse oscillation laser light in irradiating the semiconductor film.
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Citations
56 Claims
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1. A semiconductor device comprising:
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an insulating film having a rectangular or stripe pattern depression portion and projection portion; and
a thin film transistor having a channel formation region that is placed only between a center and an edge of the depression portion of the insulating film, wherein the channel formation region extends along a longitudinal direction of the rectangular or stripe pattern depression portion and projection portion. - View Dependent Claims (2, 3, 4, 5, 6)
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7. The semiconductor device according to claim , wherein a nitrogen concentration in the channel formation region is 1×
- 1019 atoms/cm3 or less.
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8. A semiconductor device comprising:
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an insulating film having plural rectangular or stripe pattern depression portions and projection portions; and
a thin film transistor having plural channel formation regions that are placed only between a center and an edge of each of the depression portions of the insulating film, wherein the channel formation regions are separated from one another and positioned between a source region and a drain region that extend over the depression portions respectively, and wherein the channel formation regions extend along a longitudinal direction of the rectangular or stripe pattern depression portions and projection portions. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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15. A semiconductor device comprising:
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an insulating film having plural rectangular or stripe pattern depression portions and projection portions; and
a thin film transistor having plural channel formation regions that are placed only between a center and an edge of each of the depression portions of the insulating film, wherein the channel formation regions are separated from one another and positioned between a source region and a drain region that stretch over the depression portions respectively, and wherein the channel formation regions are parallel to one another extending along a longitudinal direction of the rectangular or stripe pattern depression portions and projection portions. - View Dependent Claims (16, 17, 18, 19, 20, 21)
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22. A semiconductor device comprising:
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an insulating film having a rectangular or stripe pattern depression portion and projection portion; and
a thin film transistor having a channel formation region that is placed only between a center and an edge of the projection portion of the insulating film, wherein the channel formation region extends along a longitudinal direction of the rectangular or stripe pattern depression portion and projection portion. - View Dependent Claims (23, 24, 25, 26, 27, 28)
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29. A semiconductor device comprising:
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an insulating film having plural rectangular or stripe pattern depression portions and projection portions; and
a thin film transistor having plural channel formation regions that are placed only between a center and an edge of each of the projection portions of the insulating film, wherein the channel formation regions are separated from one another and positioned between a source region and a drain region that extend over the projection portions respectively, and wherein the channel formation regions extend along a longitudinal direction of the rectangular or stripe pattern depression portions and projection portions. - View Dependent Claims (30, 31, 32, 33, 34, 35)
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36. A semiconductor device comprising:
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an insulating film having plural rectangular or stripe pattern depression portions and projection portions; and
a thin film transistor having plural channel formation regions that are placed only between a center and an edge of each of the projection portions of the insulating film, wherein the channel formation regions are separated from one another and positioned between a source region and a drain region that extend over the depression portions respectively, and wherein the channel formation regions are parallel to one another extending along a longitudinal direction of the rectangular or stripe pattern depression portions and projection portions. - View Dependent Claims (37, 38, 39, 40, 41, 42)
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43. A semiconductor device comprising:
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an insulating film having a rectangular or stripe pattern depression portion and projection portion; and
a thin film transistor having a channel formation region that is not placed over a midpoint of the depression portion of the insulating film, wherein the channel formation region extends along a longitudinal direction of the rectangular or stripe pattern depression portion and projection portion. - View Dependent Claims (44, 45, 46, 47, 48, 49)
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50. A semiconductor device comprising:
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an insulating film having a rectangular or stripe pattern depression portion and projection portion; and
a thin film transistor having a channel formation region that is not placed over a midpoint of the projection portion of the insulating film, wherein the channel formation region extends along a longitudinal direction of the rectangular or stripe pattern depression portion and projection portion. - View Dependent Claims (51, 52, 53, 54, 55, 56)
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Specification