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Guideless stage with isolated reaction stage

  • US 6,841,965 B2
  • Filed: 06/15/2001
  • Issued: 01/11/2005
  • Est. Priority Date: 04/01/1994
  • Status: Expired due to Fees
First Claim
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1. A method of making a microlithography system that forms an image onto an object, comprising the steps of:

  • providing an irradiation apparatus that irradiates the object with radiation to form the image on the object;

    providing a movable stage associated with the irradiation apparatus, the movable stage having a first mirror;

    providing a first support structure;

    providing a second mirror that is connected to the irradiation apparatus;

    providing a second support structure dynamically isolated from the first support structure to support the irradiation apparatus, the second support structure including a base member that supports the movable stage;

    providing a drive having a first portion connected to the movable stage and a second portion connected to the first support structure to move the movable stage in a two-dimensional plane such that a reaction force exerted by the movement of the movable stage is transferred to the first support structure, the second portion of the drive not contacting the movable stage mechanically; and

    providing a position detector that cooperates with the first mirror and the second mirror to detect a position of the movable stage in the two-dimensional plane, the position detector being supported by the second support structure.

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