Torsion spring for electro-mechanical switches and a cantilever-type RF micro-electromechanical switch incorporating the torsion spring
First Claim
1. A micro-electro-mechanical switch comprising:
- a substrate;
an input line on top of the substrate;
an output line on top of the substrate and separated from the input line;
a substrate electrode on top of the substrate, located near but separated from the input line and the output line; and
an armature comprising;
a first beam structural layer having a first end mechanically connected with the substrate and a second end including a set of tines including at least one tine with a terminus portion rotatably suspended therefrom, with the terminus portion including a conducting transmission line positioned over the input and output lines, with the at least a portion of the conducting transmission line exposed for conformal contact with the input and output lines; and
an armature electrode positioned directly above the substrate electrode and suspended on the armature;
an insulating layer positioned between the armature electrode and the substrate electrode to prevent short-circuiting therebetween;
whereby when the switch is actuated into a “
closed”
position, the terminus portion is free to rotate to ensure a conformal contact between the exposed portion of the conducting transmission line and the input and output lines in order to form a circuit therebetween to permit the flow of electricity.
1 Assignment
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Accused Products
Abstract
A torsion spring for an electro-mechanical switch is presented. The torsion spring comprises a set of tines including at least one tine extending from the free end of the armature of a switch. A terminus portion is rotatably suspended between the tines, and includes a conducting transmission line, at least a portion of which is exposed for electrical contact. The conducting transmission line has a length selected such that the exposed portion of the transmission line forms a circuit between the input and output of the micro-electro-mechanical switch when the micro-electro-mechanical switch is urged into a closed position, with the terminus portion rotating via the tines to form a conformal connection between the exposed portion of the conducting transmission line and the input and output of the switch, thus optimizing the electrical flow therebetween. The switch is also applied to MEMS devices.
39 Citations
34 Claims
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1. A micro-electro-mechanical switch comprising:
-
a substrate;
an input line on top of the substrate;
an output line on top of the substrate and separated from the input line;
a substrate electrode on top of the substrate, located near but separated from the input line and the output line; and
an armature comprising;
a first beam structural layer having a first end mechanically connected with the substrate and a second end including a set of tines including at least one tine with a terminus portion rotatably suspended therefrom, with the terminus portion including a conducting transmission line positioned over the input and output lines, with the at least a portion of the conducting transmission line exposed for conformal contact with the input and output lines; and
an armature electrode positioned directly above the substrate electrode and suspended on the armature;
an insulating layer positioned between the armature electrode and the substrate electrode to prevent short-circuiting therebetween;
whereby when the switch is actuated into a “
closed”
position, the terminus portion is free to rotate to ensure a conformal contact between the exposed portion of the conducting transmission line and the input and output lines in order to form a circuit therebetween to permit the flow of electricity. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34)
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Specification