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Broad band DUV, VUV long-working distance catadioptric imaging system

  • US 6,842,298 B1
  • Filed: 02/28/2001
  • Issued: 01/11/2005
  • Est. Priority Date: 09/12/2000
  • Status: Expired due to Term
First Claim
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1. A method of imaging an object, comprising:

  • collecting light from said object with a focussing lens group;

    correcting chromatic aberration by use of a catadioptric group; and

    passing said light through a field lens group located between said focussing lens group and said catadioptric group;

    wherein said catadioptric group comprises a plurality of Mangin reflective elements and said light collecting occurs at a numerical aperture of in excess of 0.8.

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