Capacitive pressure transmitter
First Claim
Patent Images
1. A capacitive pressure transmitter comprising:
- a capacitive pressure sensor having a first and second sensor inlets, wherein each inlet is fluidically coupled to a side of a conductive deflectable measuring diaphragm;
a self-contained isolator having a process fluid inlet, and an isolator fluid outlet operably coupled to the first sensor inlet, the self-contained isolator also having an isolator diaphragm disposed to fluidically isolate the process fluid inlet from the isolator fluid outlet while providing a pressure at the isolator fluid outlet related to a pressure at the process fluid inlet;
a second transmitter inlet operably coupled to the second sensor inlet;
sensor circuitry coupled to the capacitive pressure sensor to generate a sensor signal based upon the capacitance of the capacitive pressure sensor; and
transmitter circuitry coupled to the sensor circuitry to transmit information relative to the sensor signal over a process communication loop.
1 Assignment
0 Petitions
Accused Products
Abstract
A capacitive pressure transmitter is provided. In one aspect, the transmitter includes a capacitive pressure sensor coupled directly to the measured media without any intervening fluid isolation. A filter is preferably used to keep particulates from reaching the measuring diaphragm. In another aspect, a capacitive pressure transmitter is provided with at least one self-contained isolator interposed between a process connection and the capacitive pressure sensor. In both aspects, the capacitive pressure transmitter is relatively small and preferably constructed from materials that facilitate low-cost manufacture.
23 Citations
3 Claims
-
1. A capacitive pressure transmitter comprising:
-
a capacitive pressure sensor having a first and second sensor inlets, wherein each inlet is fluidically coupled to a side of a conductive deflectable measuring diaphragm;
a self-contained isolator having a process fluid inlet, and an isolator fluid outlet operably coupled to the first sensor inlet, the self-contained isolator also having an isolator diaphragm disposed to fluidically isolate the process fluid inlet from the isolator fluid outlet while providing a pressure at the isolator fluid outlet related to a pressure at the process fluid inlet;
a second transmitter inlet operably coupled to the second sensor inlet;
sensor circuitry coupled to the capacitive pressure sensor to generate a sensor signal based upon the capacitance of the capacitive pressure sensor; and
transmitter circuitry coupled to the sensor circuitry to transmit information relative to the sensor signal over a process communication loop. - View Dependent Claims (2, 3)
-
Specification