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Capacitive pressure transmitter

  • US 6,843,133 B2
  • Filed: 05/15/2003
  • Issued: 01/18/2005
  • Est. Priority Date: 06/18/2002
  • Status: Active Grant
First Claim
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1. A capacitive pressure transmitter comprising:

  • a capacitive pressure sensor having a first and second sensor inlets, wherein each inlet is fluidically coupled to a side of a conductive deflectable measuring diaphragm;

    a self-contained isolator having a process fluid inlet, and an isolator fluid outlet operably coupled to the first sensor inlet, the self-contained isolator also having an isolator diaphragm disposed to fluidically isolate the process fluid inlet from the isolator fluid outlet while providing a pressure at the isolator fluid outlet related to a pressure at the process fluid inlet;

    a second transmitter inlet operably coupled to the second sensor inlet;

    sensor circuitry coupled to the capacitive pressure sensor to generate a sensor signal based upon the capacitance of the capacitive pressure sensor; and

    transmitter circuitry coupled to the sensor circuitry to transmit information relative to the sensor signal over a process communication loop.

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