Continuously variable analog micro-mirror device
First Claim
1. A method of using a micro-mirror device having a reflective element, a pair of electrodes spaced from the reflective element, and a dielectric liquid disposed at least between the reflective element and the pair of electrodes, said method comprising the steps of:
- electrically coupling to the pair of electrodes an operational amplifier having an output for coupling to at least one of the pair of electrodes and having inverting and non-inverting inputs;
electrically coupling the reflective element to the inverting input of the operational amplifier to provide feedback; and
applying an analog positioning signal to the non-inverting input of the operational amplifier, whereby the reflective element is positioned at a selected position within a continuous range between a first position and a second position in response to the applied analog positioning signal.
0 Assignments
0 Petitions
Accused Products
Abstract
A micro-mirror device includes a substrate, a reflective element spaced from the surface of the substrate, a pair of electrodes disposed adjacent to the surface of the substrate, spaced apart from each other, and disposed adjacent to opposite ends of the reflective element, and including a dielectric liquid disposed at least between the reflective element and the pair of electrodes. The reflective element is adapted to be positioned at any position within a continuous range between a first position and a second position in response to analog electrical signals applied to the pair of electrodes.
-
Citations
13 Claims
-
1. A method of using a micro-mirror device having a reflective element, a pair of electrodes spaced from the reflective element, and a dielectric liquid disposed at least between the reflective element and the pair of electrodes, said method comprising the steps of:
-
electrically coupling to the pair of electrodes an operational amplifier having an output for coupling to at least one of the pair of electrodes and having inverting and non-inverting inputs;
electrically coupling the reflective element to the inverting input of the operational amplifier to provide feedback; and
applying an analog positioning signal to the non-inverting input of the operational amplifier, whereby the reflective element is positioned at a selected position within a continuous range between a first position and a second position in response to the applied analog positioning signal. - View Dependent Claims (2)
-
-
3. A method of fabricating a micro-mirror device, the method comprising the steps of:
-
providing a substrate having a surface;
.5 providing a plate oriented substantially parallel to the surface of the substrate and spacing the plate from the surface of the substrate, including defining a cavity between the plate and the surface of the substrate;
disposing a dielectric liquid in the cavity; and
interposing a reflective element between the surface of the substrate and the plate, wherein the reflective element is adapted to move to a selected position within a continuous range between a first position and a second position. - View Dependent Claims (4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
-
Specification