Actuator-controlled mirror with Z-stop mechanism
First Claim
Patent Images
1. A device, comprising:
- a fixed frame;
a mirror assembly having a coil and a mirror that are fixed relative to each other;
a flexure spring engaging said mirror to said fixed frame to allow said mirror assembly to rotate around a rotational axis relative to said fixed frame under an action of a torque;
a rigid support bar fixed to said fixed frame;
a pivot support unit disposed between and in contact with said support bar and said mirror assembly to pivot said mirror assembly at or near a center of rotation of said mirror assembly with respect to said support bar; and
a second mirror in said mirror assembly, fixed relative to said mirror, said second mirror having a reflective surface facing a direction opposite to a reflective surface of said mirror.
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Abstract
Actuator-controlled mirrors with a Z-stop mechanism to reduce an undesired translational motion of the mirrors.
39 Citations
10 Claims
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1. A device, comprising:
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a fixed frame;
a mirror assembly having a coil and a mirror that are fixed relative to each other;
a flexure spring engaging said mirror to said fixed frame to allow said mirror assembly to rotate around a rotational axis relative to said fixed frame under an action of a torque;
a rigid support bar fixed to said fixed frame;
a pivot support unit disposed between and in contact with said support bar and said mirror assembly to pivot said mirror assembly at or near a center of rotation of said mirror assembly with respect to said support bar; and
a second mirror in said mirror assembly, fixed relative to said mirror, said second mirror having a reflective surface facing a direction opposite to a reflective surface of said mirror. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A device, comprising:
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a fixed frame;
a mirror assembly having a coil and a mirror that are fixed relative to each other;
a flexure spring engaging said mirror to said fixed frame to allow said mirror assembly to rotate around a rotational axis relative to said fixed frame under an action of a torque;
a rigid support bar fixed to said fixed frame; and
a pivot support unit disposed between and in contact with said support bar and said mirror assembly to pivot said mirror assembly at or near a center of rotation of said mirror assembly with respect to said support bar, wherein said flexure spring has a stiffness less than about 20 mNmm/rad. - View Dependent Claims (9, 10)
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Specification