Multiple axis modular controller and method of operating same

• US 6,845,276 B2
• Filed: 06/28/2002
• Issued: 01/18/2005
• Est. Priority Date: 06/29/2001
• Status: Expired due to Fees

• Current Assignee: Electro Scientific Industries Incorporated (MKS Instruments Incorporated)
• Original Assignee: Electro Scientific Industries Incorporated (MKS Instruments Incorporated)
• Inventors: Bocchi, Curt
• Primary Examiner(s): VOELTZ, EMANUEL T
• Application Number:
  US10/184,457
• Publication Number:
  US 20030009242A1
• Time in Patent Office: 935 Days
• Field of Search: 700/11, 700/19, 700/20, 700/61, 700/112, 700/114, 700/121, 700/245, 700/255, 318/567, 318/568.11, 318/568, 318/2, 901/8, 901/16, 901/23
• US Class Current: 700/61
• CPC Class Codes: G05B 19/4142 characterised by the use of a microprocessor G05B19/4141 takes precedence
• CPC Class Codes: G05B 2219/33154 Data exchange between processors of different axis of same or different cnc
• CPC Class Codes: G05B 2219/34015 Axis controller
• CPC Class Codes: G05B 2219/34024 Fpga fieldprogrammable gate arrays
• CPC Class Codes: G05B 2219/45031 Manufacturing semiconductor wafers

Abstract

A multiple axis modular controller and a method of operating the controller in a system comprising input devices receiving indications of system conditions and output devices performing tasks affecting the system conditions. The controller includes input connectors connectable to the input devices and output connectors connectable to the output devices. A processor executes a series of sequential commands of an application program. A command can be executed in response to completion of one sequential command of the series of sequential commands regardless of a next sequential command in the series of sequential commands or in response to a specified input received at one of the input connectors or in response to a specified output sent to one of the output connectors. The processor does not execute the command, minimizing processor delays.

Claims

1. A multiple axis modular controller for use in a system comprising input devices receiving indications of system conditions and output devices performing tasks affecting the system conditions, the output devices including at least a first motor and a second motor, the first motor and the second motor operable to cause movement of a first axis and a second axis, respectively, the controller comprising:

a plurality of input connectors, each of the plurality of input connectors connectable to a respective one of the input devices;

a plurality of output connectors, each of the plurality of output connectors connectable to a respective one of the output devices;

a processor operable to execute a series of sequential commands of an application program; and

means, separate from the processor, for executing a command in response to one of completion of one sequential command of the series of sequential commands regardless of a next sequential command in the series of sequential commands, a specified input received at one of the plurality of input connectors, and a specified output sent to one of the plurality of output connectors.

2. The controller according to claim 1 wherein one of the plurality of input connectors is an analog input connector connectable to an input device providing analog signals, the controller further comprising:

means for initiating an analog-to-digital conversion of an analog signal received by the analog input connector when a predetermined amount of time passes from receipt of an initial analog signal from the analog input connector.

3. The controller according to claim 1, further comprising:

a serial connector connectable to a wafer aligner.

4. The controller according to claim 1 wherein the means for executing a command further comprises a non-volatile interface for accessing and decoding data from and providing data to at least one like controller.

5. The controller according to claim 1, further comprising:

means for controlling movement of the first axis and the second axis using input signals from only one input connector.

6. The controller according to claim 1 wherein a first input connector is connectable to a first encoder measuring movement of the first axis and a second input connector is connectable to a second encoder measuring movement of the second axis, the controller further comprising:

means for detecting errors in phase transitions between sequential input signals from at least one of the first input connector and the second input connector.

7. The controller according to claim 1 wherein a first input connector is connectable to a first encoder measuring movement of the first axis, the controller further comprising:

a logic circuit operable to produce a signal at specified positions of the first axis.

8. The controller according to claim 1, further comprising:

a serial port connectable to a host processor; and

a non-volatile interface for accessing and decoding data from and providing data to the host processor.

9. The controller according to claim 1, further comprising:

means for coordinating movement of at least two axes through a number of spatial coordinates along a motion path of a virtual axis.

10. A controller according to claim 1, further comprising:

a first output connector connectable to one of the first motor and an external driver of the first motor;

a motor driver circuit connected to the first output connector, the motor driver circuit including a motor driver; and

means for disabling the motor driver when the first motor has the external driver.

11. A method of operating a multiple axis modular controller in a system comprising input devices receiving indications of system conditions and output devices performing tasks affecting the system conditions, the output devices including at least a first motor and a second motor, the first motor and the second motor operable to cause movement of a first axis and a second axis, respectively, the method comprising:

connecting each of a plurality of input connectors to a respective one of the input devices;

connecting each of a plurality of output connectors to a respective one of the output devices;

executing a series of sequential commands of an application program using a processor; and

executing, using means separate from the processor, a command in response to one of completion of one sequential command of the series of sequential commands regardless of a next sequential command in the series of sequential commands, a specified input received at one of the plurality of input connectors, and a specified output sent to one of the plurality of output connectors.

12. The method according to claim 11, further comprising:

connecting an input device providing analog signals to an analog input connector, the analog input connector being one of the plurality of input connectors; and

initiating an analog-to-digital conversion of an analog signal received by the analog input connector when a predetermined amount of time passes from receipt of an initial analog signal from the analog input connector.

13. The method according to claim 11, further comprising:

connecting a wafer aligner to a serial connector.

14. The method according to claim 11 wherein executing the command further comprises connecting a non-volatile interface to a like controller, the non-volatile interface accessing and decoding data from the controller, the method further including:

affecting an output of the like controller upon executing the command.

15. The method according to claim 11, further comprising:

controlling movement of the first axis and the second axis using input signals from only one input connector.

16. The method according to claim 11, further comprising:

connecting a first input connector to a first encoder measuring movement of the first axis;

connecting a second input connector to a second encoder measuring movement of the second axis; and

detecting errors in phase transitions between sequential input signals from at least one of the first input connector and the second input connector.

17. The method according to claim 11, further comprising:

connecting a first input connector to a first encoder measuring movement of the first axis; and

producing, using a logic circuit, a signal at specified positions of the first axis.

18. The method according to claim 11, further comprising:

connecting a host processor to a serial port; and

accessing and decoding data from and providing data to the host processor using a non-volatile interface.

19. The method according to claim 11, further comprising:

coordinating movement of at least two axes through a number of spatial coordinates along a motion path of a virtual axis.

20. A method according to claim 11, further comprising:

connecting a first output connector to one of the first motor and an external driver of the first motor, a motor driver circuit connected to the first output connector and the motor driver circuit including a motor driver; and

disabling the motor driver when the first motor has the external driver.