Single proof mass, 3 axis MEMS transducer
First Claim
Patent Images
1. A transducer being adapted to sense acceleration in at least two mutually orthogonal directions, comprising:
- an unbalanced proof mass; and
a first set of sense fingers aligned along a first axis.
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Abstract
A transducer is provided herein which comprises an unbalanced proof mass (51), and which is adapted to sense acceleration in at least two mutually orthogonal directions. The proof mass (51) has first (65) and second (67) opposing sides that are of unequal mass.
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Citations
46 Claims
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1. A transducer being adapted to sense acceleration in at least two mutually orthogonal directions, comprising:
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an unbalanced proof mass; and
a first set of sense fingers aligned along a first axis. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A transducer, comprising:
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a proof mass having first and second sets of fingers adapted to sense acceleration along first and second mutually orthogonal axes;
first and second capacitive plates adapted to sense acceleration along a third axis that is orthogonal to said first and second axes; and
at least one anchor for said proof mass, said anchor being attached to said proof mass;
wherein the weight of the proof mass is asymmetrically supported by the at least one anchor. - View Dependent Claims (20, 21, 22, 23)
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24. A transducer, comprising:
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an unbalanced proof mass;
first and second capacitive plates disposed beneath said proof mass, said plates being adapted to detect movement of the proof mass along an axis perpendicular to the plane of at least one of said first and second plates; and
a first set of sense fingers aligned along a first axis. - View Dependent Claims (25, 26)
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27. A transducer, comprising:
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a substrate;
a first conductive layer disposed on said substrate, said first conductive layer having first and second capacitive structures defined therein; and
a second conductive layer disposed over the first conductive layer wherein the second conductive layer has a proof mass and sense fingers defined therein such that the center of mass of the proof mass is asymmetrically disposed relative to said first and second capacitive structures. - View Dependent Claims (28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39)
wherein each sense finger is disposed between a pair of fixed fingers, and wherein the first and second sets of sense fingers, the plurality of compliant structures, and the plurality of fixed fingers are disposed in an arrangement that has at least one plane of mirror symmetry.
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35. The transducer of claim 34, further comprising a substrate, a first conductive layer, and a second conductive layer, wherein the first and second sets of sense fingers, the plurality of compliant structures, and the plurality of fixed fingers are formed in the second conductive layer, and wherein the arrangement has at least two planes of mirror symmetry about an axis orthogonal to a major surface of the second conductive layer.
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36. The transducer of claim 35, wherein the arrangement has at least a four-fold rotational axis of symmetry around an axis orthogonal to a major surface of the second conductive layer.
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37. The transducer of claim 27, wherein the proof mass is asymmetrically disposed relative to said first and second capacitive structures.
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38. The transducer of claim 27, further comprising a material disposed on a surface of the proof mass such that the center of mass of the proof mass is asymmetrically disposed relative to said fist and second plates.
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39. The transducer of claim 38, wherein the material comprises a metal.
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40. A transducer being adapted to sense acceleration in at least two mutually orthogonal directions, comprising:
a proof mass comprising a central portion equipped with a plurality of sense fingers, and further comprising opposing side portions, adjacent to said central portion, that are of unequal mass. - View Dependent Claims (41, 42, 43)
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44. A transducer being adapted to sense acceleration in at least two mutually orthogonal directions, comprising:
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a proof mass supported on a substrate, said proof mass having a first set of sense fingers aligned along a first axis; and
first and second capacitive structures disposed between said substrate and said proof mass;
wherein the center of mass of said proof mass is closer to said first capacitive structure than to said second capacitive structure. - View Dependent Claims (45, 46)
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Specification