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Single proof mass, 3 axis MEMS transducer

  • US 6,845,670 B1
  • Filed: 07/08/2003
  • Issued: 01/25/2005
  • Est. Priority Date: 07/08/2003
  • Status: Expired due to Term
First Claim
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1. A transducer being adapted to sense acceleration in at least two mutually orthogonal directions, comprising:

  • an unbalanced proof mass; and

    a first set of sense fingers aligned along a first axis.

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  • 20 Assignments
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