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Shock protectors for micro-mechanical systems

  • US 6,846,088 B2
  • Filed: 12/01/2003
  • Issued: 01/25/2005
  • Est. Priority Date: 09/27/2002
  • Status: Active Grant
First Claim
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1. method for increasing heat transfer from a mirror coupled to a pedestal suspended by gimbal springs over a lower surface, the method comprising:

  • providing a solid heat-conduction path to the lower surface, the solid heat-conduction path being located within 3 μ

    m of the pedestal.

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