Silicon capacitive microphone
First Claim
1. An integrated capacitive transducer comprising:
- a diaphragm having an edge;
a remaining diaphragm layer laterally spaced from the diaphragm forming a passage in proximity to the edge of the diaphragm;
a backplate spaced in proximity to the diaphragm; and
, a plurality of supports connected to the backplate, for supporting the diaphragm.
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Accused Products
Abstract
The present invention is directed to a process for the manufacture of a plurality of integrated capacitive transducers. The process comprises the steps of supplying a first substrate of a semiconductor material having first and second faces, supplying a second substrate of a semiconductor material having first and second faces, forming a diaphragm layer on the first face of the first substrate, forming a backplate layer on the first face of the other of the second substrate, forming a support layer on the backplate layer, etching a plurality of supports from the support layer, for each of the capacitive transducers, etching a plurality of vents from the backplate layer, for each of the capacitive transducers, positioning the diaphragm layer of the first substrate adjacent with the support layer of the second substrate, and welding the diaphragm layer and the support layer together, removing at least a portion of the first substrate to expose the diaphragm layer, for each of the capacitive transducers, removing a portion of the second substrate to expose the vents, for each of the capacitive transducers, and, etching a portion of the diaphragm layer, for each of the capacitive transducers.
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Citations
29 Claims
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1. An integrated capacitive transducer comprising:
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a diaphragm having an edge;
a remaining diaphragm layer laterally spaced from the diaphragm forming a passage in proximity to the edge of the diaphragm;
a backplate spaced in proximity to the diaphragm; and
,a plurality of supports connected to the backplate, for supporting the diaphragm. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. An integrated capacitive transducer comprising:
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a diaphragm having a diaphragm surface and an edge defined by the surface;
a backplate having a backplate surface; and
a plurality of supports connected to the backplate surface and the diaphragm surface inwardly from the edge, the supports extending between the backplate surface and the diaphragm surface for supporting the diaphragm and backplate in spaced relationship to each other. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27)
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28. An integrated capacitive transducer comprising:
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a diaphragm;
a backplate;
means connected to each of the diaphragm and the backplate for supporting the diaphragm and backplate in spaced relationship; and
means for reducing parasitic capacitance. - View Dependent Claims (29)
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Specification