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Silicon capacitive microphone

  • US 6,847,090 B2
  • Filed: 01/08/2002
  • Issued: 01/25/2005
  • Est. Priority Date: 01/24/2001
  • Status: Active Grant
First Claim
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1. An integrated capacitive transducer comprising:

  • a diaphragm having an edge;

    a remaining diaphragm layer laterally spaced from the diaphragm forming a passage in proximity to the edge of the diaphragm;

    a backplate spaced in proximity to the diaphragm; and

    , a plurality of supports connected to the backplate, for supporting the diaphragm.

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