Electromagnetic actuator having an armature coil surrounded by heat-conducting anisotropy material and exposure apparatus
First Claim
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1. An electromagnetic actuator comprising:
- a permanent magnet;
an armature coil for performing relative movement with respect to said permanent magnet;
a material having heat-conduction anisotropy that surrounds said armature coil, said material having a thermal conductivity in the lateral direction greater than a thermal conductivity in the longitudinal direction; and
a heat radiating member coupled to the heat-conduction anisotropic material for radiating heat generated by said armature coil.
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Abstract
An electromagnetic actuator has a permanent magnet and an armature coil that performs relative movement with respect to the permanent magnet. A material having heat conduction anisotropy surrounds a surface of the armature coil and a heat radiating member radiates heat generated by the armature coil. The heat conduction anisotropic material is oriented to guide the heat generated from the armature coil to the heat radiating member. The actuator may be used in one or more groups of semiconductor substrate exposure apparatuses in a manufacturing factory that performs plural processes using the group of manufacturing apparatuses.
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Citations
26 Claims
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1. An electromagnetic actuator comprising:
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a permanent magnet;
an armature coil for performing relative movement with respect to said permanent magnet;
a material having heat-conduction anisotropy that surrounds said armature coil, said material having a thermal conductivity in the lateral direction greater than a thermal conductivity in the longitudinal direction; and
a heat radiating member coupled to the heat-conduction anisotropic material for radiating heat generated by said armature coil. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. An exposure apparatus for exposing a substrate with a pattern of an original plate, said apparatus comprising:
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a stage for moving the original plate or the substrate, said stage comprising;
a permanent magnet;
an armature coil capable of performing relative movement with respect to said permanent magnet;
a material having heat-conduction anisotropy that surrounds said armature coil, said material having a thermal conductivity in the lateral direction greater than a thermal conductivity in the longitudinal direction; and
a heat radiating member coupled to said heat-conduction anisotropic material for radiating heat generated by said armature coil. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25, 26)
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Specification