×

Rotary electrostatic microactuator

  • US 6,847,151 B2
  • Filed: 09/11/2002
  • Issued: 01/25/2005
  • Est. Priority Date: 11/29/1999
  • Status: Expired due to Term
First Claim
Patent Images

1. A rotary electrostatic microactuator comprising a substrate extending substantially in a plane, at least one comb drive assembly carried by the substrate and having a first comb drive member mounted on the substrate and a second comb drive member, first and second spaced-apart springs, each of the first and second springs having a first end portion coupled to the substrate and a second end portion coupled to the second comb drive member for suspending the second comb drive member over the substrate, the second comb drive member being part of a movable structure that is rotatable about an axis of rotation from a first position to a second position relative to the first comb drive member, the movable structure and the first and second springs extending radially outwardly from the axis of rotation and having a shape of a truncated sector of a circle when viewed in plan, the axis of rotation intersecting the plane of the substrate at a location spaced radially inwardly from and free of the movable structure and the first and second springs.

View all claims
  • 3 Assignments
Timeline View
Assignment View
    ×
    ×