Rotary electrostatic microactuator
First Claim
1. A rotary electrostatic microactuator comprising a substrate extending substantially in a plane, at least one comb drive assembly carried by the substrate and having a first comb drive member mounted on the substrate and a second comb drive member, first and second spaced-apart springs, each of the first and second springs having a first end portion coupled to the substrate and a second end portion coupled to the second comb drive member for suspending the second comb drive member over the substrate, the second comb drive member being part of a movable structure that is rotatable about an axis of rotation from a first position to a second position relative to the first comb drive member, the movable structure and the first and second springs extending radially outwardly from the axis of rotation and having a shape of a truncated sector of a circle when viewed in plan, the axis of rotation intersecting the plane of the substrate at a location spaced radially inwardly from and free of the movable structure and the first and second springs.
3 Assignments
0 Petitions
Accused Products
Abstract
A balanced microdevice that includes a substrate and at least one comb drive assembly having first and second comb drive members. The first comb drive member is mounted on the substrate and the second comb drive member overlies the substrate. At least one spring member is provided that has a first end portion coupled to the substrate and a second end portion coupled to the second comb drive member. The first comb drive member has a plurality of spaced-apart first comb drive fingers and the second comb drive member has a plurality of spaced-apart second comb drive fingers. The second comb drive member is movable between a first position in which the first and second comb drive fingers are not substantially fully interdigitated and a second position in which the first and second comb drive fingers are substantially fully interdigitated. A counterbalance is carried by the substrate and coupled to the second comb drive member for inhibiting undesirable movement of the second comb drive member in response to externally applied accelerations to the microdevice.
-
Citations
20 Claims
- 1. A rotary electrostatic microactuator comprising a substrate extending substantially in a plane, at least one comb drive assembly carried by the substrate and having a first comb drive member mounted on the substrate and a second comb drive member, first and second spaced-apart springs, each of the first and second springs having a first end portion coupled to the substrate and a second end portion coupled to the second comb drive member for suspending the second comb drive member over the substrate, the second comb drive member being part of a movable structure that is rotatable about an axis of rotation from a first position to a second position relative to the first comb drive member, the movable structure and the first and second springs extending radially outwardly from the axis of rotation and having a shape of a truncated sector of a circle when viewed in plan, the axis of rotation intersecting the plane of the substrate at a location spaced radially inwardly from and free of the movable structure and the first and second springs.
- 9. A rotary electrostatic microactuator comprising a substrate extending substantially in a plane, a plurality of comb drive assemblies carried by the substrate, each of the comb drive assemblies having a first comb drive member mounted on the substrate and a second comb drive member, each of the first and second comb drive members being provided with arcuate comb drive fingers, first and second spaced-apart springs, each of the first and second springs having a first end portion coupled to the substrate and a second end portion coupled to at least one of the second comb drive members for suspending the second comb drive members over the substrate, the second comb drive members being part of a movable structure that is rotatable about an axis of rotation between a first position in which the comb drive fingers of the first and second comb drive members are not substantially fully interdigitated and a second position in which the comb drive fingers of the first and second comb drive members are substantially fully interdigitated, the movable structure extending radially outwardly from the axis of rotation and having a shape of a truncated sector of a circle when viewed in plan, the axis of rotation intersecting the plane of the substrate at a location spaced radially inwardly from the movable structure.
- 15. A rotary electrostatic microactuator comprising a substrate extending substantially in a plane, at least one comb drive assembly carried by the substrate and having a first comb drive member mounted on the substrate and a second comb drive member, first and second spaced-apart springs, each of the first and second springs having an inner radial portion coupled to the substrate and an outer radial portion coupled to the second comb drive member for suspending the second comb drive member over the substrate, the second comb drive member being part of a movable structure that is rotatable about an axis of rotation from a first position to a second position relative to the first comb drive member, the movable structure and first and second springs extending radially outwardly from the axis of rotation and having a shape of a truncated sector of a circle when viewed in plan, the axis of rotation intersecting the plane of the substrate at a location spaced radially inwardly from and free of the movable structure and the first and second springs.
Specification