Microelectromechnical system for tilting a platform

• US 6,847,152 B2
• Filed: 10/30/2003
• Issued: 01/25/2005
• Est. Priority Date: 09/27/2001
• Status: Expired due to Term

• Current Assignee: NeoPhotonics Corporation (Lumentum Holdings Inc.)
• Original Assignee: MEMX, Inc. (Lumentum Holdings Inc.)
• Inventors: Miller, Samuel Lee, Rodgers, Murray Steven, Barnes, Stephen Matthew, Sniegowski, Jeffry Joseph, McWhorter, Paul Jackson
• Primary Examiner(s): TAMAI, KARL I
• Application Number:
  US10/697,385
• Publication Number:
  US 20040090143A1
• Time in Patent Office: 453 Days
• Field of Search: 310/309, 385/16, 385/18, 359/223, 359/224, 359/225, 359/298, 359/872, 744901-49015, 182/182.1
• US Class Current: 310/309
• CPC Class Codes: B33Y 80/00 Products made by additive manufacturing
• CPC Class Codes: B81B 3/0062 Devices moving in two or more dimensions, i.e. having special features which allow movement in more than one dimension
• CPC Class Codes: H02N 1/006 of the gap-closing type H02N1/004 takes precedence
• CPC Class Codes: H02N 1/008 Laterally driven motors, e.g. of the comb-drive type

Abstract

The present invention provides a MEM system (10) having a platform (14) that is both elevatable from the substrate (12) on which it is fabricated and tiltable with one, two or more degrees of freedom with respect to the substrate (12). In one embodiment, the MEM system (10) includes the platform (14), a pair of A-frame structures (40), and two pairs of actuators (30) formed on the substrate (12). Ends (46A) of rigid members (46) extending from apexes (40A) of the A-frame structures (40) are attached to the platform (14) by compliant members (48A, 48B). The platform (14) is also attached to the substrate (12) by a compliant member (48C). The A-frame structures (40) are separately pivotable about bases (40B) thereof. Each pair of actuators (30) is coupled through a yoke (32) and displacement multiplier (34) to one of the A-frame structures (40) and is separately operable to effect pivoting of the A-frame structures (40) with respect to the substrate (12) by equal or unequal angular amounts. Upon pivoting, the A-frame structures (40) act as lever arms to both lift the platform (14) and tilt the platform (14) with respect to the substrate (12) with at least one degree of freedom. Since the platform (14) lifts up from the surface of the substrate (12), it may be tilted at large angles with respect to the substrate (12).

Claims

1. A microelectromechanical system comprising:

substrate means for fabricating microelectromechanical components thereon;

platform means, fabricated on said substrate means, for supporting a desired optical element thereon, said platform means being elevatable in their entirety from said substrate means; and

at least one rotatable lever means, fabricated on said substrate means, for applying a tilting force to said platform means to achieve increased inclination of said platform means with respect to said substrate means in at least a first direction that is the same as a direction in which said lever means are rotatable, wherein said lever means are rotatable in response to an actuation force pulling on said lever means, said actuation force being mechanically coupled to said lever means and generated without utilizing an portion of said lever means and said platform means.

2. The microelectromechanical system of claim 1 wherein said desired optical element comprises one of an optically reflective surface, a diffraction grating, a lens, and an optical polarizer.

3. The microelectromechanical system of claim 1 further comprising:

actuation means, fabricated on said substrate means, for rotating said lever means.

4. The microelectromechanical system of claim 3 wherein said actuation means comprise an electrostatic actuator.

5. The microelectromechanical system of claim 1 wherein said substrate means comprises a silicon wafer.

6. The microelectromechanical system of claim 1 wherein said platform means comprises a layer of one of monocrystalline and polycrystalline silicon deposited on said substrate means.

7. The microelectromechanical system of claim 1 wherein said lever means comprise an A-frame structure.

8. The microelectromechanical system of claim 1 further comprising:

first compliant means for attaching said lever means to said platform at a first attachment location; and

second compliant means for attaching said platform means to said substrate means at a second attachment location.

9. The system of claim 8 wherein said first and second compliant means comprise springs.

10. A microelectromechanical system comprising:

substrate means for fabricating microelectromechanical components thereon;

platform means, fabricated on said substrate means, for supporting a desired optical element thereon, said platform means being elevatable in their entirety from said substrate means; and

at least one rotatable lever means comprising an A-frame structure, fabricated on said substrate means, for applying force to said platform means to achieve inclination of said platform means in at least a first direction that is the same as a direction in which said lever means are rotatable.