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Method for measuring a gap between a proximity probe and a conductive target material

  • US 6,847,217 B2
  • Filed: 05/30/2003
  • Issued: 01/25/2005
  • Est. Priority Date: 10/22/1999
  • Status: Expired due to Fees
First Claim
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1. A method for measuring a gap between a proximity probe and a conductive target material, the steps including:

  • providing a database having a defined series of gap locus each representative of the same gap for different target materials stored therein;

    measuring an impedance of a proximity probe located proximate a conductive target material to be monitored;

    normalizing the measured probe impedance;

    comparing the normalized probe impedance with the defined series of gap locus stored in the database for determining a gap locus which defines a gap between the proximity probe located proximate the conductive target material such that the defined gap is substantially correct for any conductive target material located proximate the proximity probe for providing a material insensitive method for measuring gaps between the proximity probe and different conductive target materials.

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