Microelectromechanical RF and microwave frequency power regulator

• US 6,847,266 B2
• Filed: 01/06/2003
• Issued: 01/25/2005
• Est. Priority Date: 10/30/1999
• Status: Expired due to Fees

• Current Assignee: HRL Laboratories LLC (The Boeing Co.)
• Original Assignee: HRL Laboratories LLC (The Boeing Co.)
• Inventors: Laney, David, Matloubian, Mehran, Larson, Lawrence
• Primary Examiner(s): Pascal, Robert
• Assistant Examiner(s): TAKAOKA, DEAN O
• Application Number:
  US10/337,967
• Publication Number:
  US 20030222728A1
• Time in Patent Office: 750 Days
• Field of Search: 333/17.2, 333/101, 333/105, 333/262, 333/12, 200/181, 361/56
• US Class Current: 333/12
• CPC Class Codes: H01H 59/0009 making use of micromechanics
• CPC Class Codes: H01P 1/127 Strip line switches
• CPC Class Codes: H01P 3/084 Suspended microstriplines

Abstract

Microelectromechanical RF and microwave frequency power limiter and electrostatic protection devices for use in high-speed circuits are presented. The devices utilize an airbridge or a cantilever arm including a contact pad positioned operatively adjacent to an electrically conductive and substantially planar transmission line. When the power level in the transmission line exceeds a particular threshold, the airbridge or cantilever arm yields due to force between the contact pad and the transmission line, directing undesired power away from active devices. This characteristic can either serve as a method by which to limit the amount of power passing through the transmission line to a determined value or as a method by which to protect devices along the transmission line from damage due to large electrostatic bursts.

Claims

1. A power regulator including:

d. a substrate having a side with at least one ground contact of an electrically conductive material formed thereon, and a substantially planar transmission line of an electrically conductive material formed thereon;

e. a substantially elongated strip of electrically conductive material electrically and mechanically connected to the at least one ground contact and positioned so that a portion of the substantially elongated strip is adjacent to the substantially planar transmission line and so that a gap is formed therebetween, such that when an undesirable signal is present in the substantially planar transmission line, a resultant force is created, causing the substantially elongated strip to flex toward the transmission line, physically and electrically contacting the transmission line and thus diverting the undesirable signal to ground by passing the signal through the substantially elongated strip to the at least one ground contact; and

f. the power regulator used for electrostatic discharge protection.

2. A power regulator including:

a. a substrate having a side with at least one ground contact of an electrically conductive material formed thereon, and a substantially planar transmission line of an electrically conductive material formed thereon;

b. a substantially elongated strip of electrically conductive material electrically and mechanically connected to the at least one ground contact and positioned so that a portion of the substantially elongated strip is adjacent to the substantially planar transmission line and so that a gap is formed therebetween, such that when an undesirable signal is present in the substantially planar transmission line, a resultant force is created, causing the substantially elongated strip to flex toward the transmission line, physically and electrically contacting the transmission line and thus diverting the undesirable signal to ground by passing the signal through the substantially elongated strip to the at least one ground contact; and

c. further including a plurality of power regulators.

3. A power regulator including:

a. a substrate having a side with at least one ground contact of an electrically conductive material formed thereon, a substantially planar transmission line of an electrically conductive material formed thereon, and an actuator pad formed thereon;

b. a substantially elongated strip of material including at least one layer of electrically conductive material, said elongated strip of material formed as a cantilever arm having a first end and a second end, with the first end mechanically attached to the substrate with the electrically conductive material electrically connected to the at least one ground contact, and the second end of the cantilever arm including an electrically conductive contact pad formed on the at least one layer of electrically conductive material and positioned adjacent to the substantially planar transmission line so that a gap is formed therebetween; and

c. the cantilever arm further including an insulating layer formed such that it resides between the first end and the second end, and resides adjacent to the actuator pad on the substrate, such that when a signal is passed to the actuator pad, the electrically conductive contact pad is forced into contact with the substantially planar transmission line and such that the insulating layer on the cantilever arm provides means to maintain a force sufficient to maintain the contact during the application of a bias to the actuation pad.

4. A power regulator as set forth in claim 3, used for electrostatic discharge protection.

5. A power regulator as set forth in claim 3, used for power limitation.

6. A power regulator system, including a plurality of power regulators as set forth in claim 3.

7. A power regulator as set forth in claim 3 wherein a DC bias is applied to the actuator pad in order to affect the power level required along the substantially planar transmission line to flex the cantilever arm such that the electrically conductive contact pad electrically contacts the substantially planar transmission line.

8. A power regulator as set forth in claim 3, wherein a portion of the actuator pads is formed of an electret material such that the power level required for flexion of the cantilever arm is affected by the built-in charge of the electret.

9. A power regulator as set forth in claim 8, wherein the electret material is selected with a built-in charge of strength sufficient that after the cantilever arm has flexed such that the electrically conductive contact pad has electrically contacted the substantially planar transmission line, the cantilever arm will remain flexed such that the electrically conductive contact pad electrically contacts the substantially planar transmission line.