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Method of constructing an inkjet printhead with a large number of nozzles

  • US 6,848,181 B1
  • Filed: 10/19/1999
  • Issued: 02/01/2005
  • Est. Priority Date: 10/16/1998
  • Status: Expired due to Fees
First Claim
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1. A method of fabricating an inkjet printhead having an array of inkjet nozzle arrangements that is configured to span a width of a print medium, each nozzle arrangement having a substrate that incorporates CMOS drive circuitry and a micro electromechanical system connected to CMOS drive circuitry to be actuated by the CMOS drive circuitry to displace at least one component of the micro electromechanical system relative to the substrate so as to achieve the ejection of ink from a nozzle of the nozzle arrangement as a result of such displacement of each component, said method comprising the steps of:

  • fabricating the inkjet nozzle arrangements with an integrated circuit fabrication technique carried out on the substrate so that each nozzle arrangement is operatively connected to the CMOS drive circuitry, the step of fabricating the inkjet nozzle arrangements including the step of;

    using a replication protocol carried out on one of the nozzle arrangements to achieve the array with a desired configuration, the replication protocol including replicating a single nozzle arrangement to fill a pod of nozzles;

    replicating the pod to form a podgroup;

    replicating the podgroup to form a segment of the printhead; and

    replicatin the segment to form the printhead.

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