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Acoustic wave sensor apparatus, method and system using wide bandgap materials

  • US 6,848,295 B2
  • Filed: 04/17/2002
  • Issued: 02/01/2005
  • Est. Priority Date: 04/17/2002
  • Status: Expired due to Fees
First Claim
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1. An acoustic wave sensor to detect an analyte, comprising:

  • a piezoelectric material including a wide bandgap semiconductor material grown using plasma source molecular beam epitaxy;

    a micro-machined arrangement having a resonating frequency; and

    an immobilization layer traversing the micro-machined arrangement, the layer containing a binding site to allow a target structure of the analyte to bind to the micro-machined arrangement so as to chance the resonating frequency, wherein the immobilization layer includes a chemical linker and wherein the chemical linker is p-maleimidophenyl isocyanate.

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